At a glance
| Booth | T9110 |
| Country | CN |
| Website | yuanxinbandaoti.netlify.app |
Company profile
Zhejiang Yuanxin Advanced Material Co., Ltd. is a high-tech enterprise focused on the R&D and production of key components inside semiconductor chambers and complete integrated solutions, and it is located in Haining, Jiaxing, Zhejiang, in the Yangtze River Delta semiconductor industry cluster. The company was established on June 4, 2021, has a factory area of more than 8,000 square meters, an investment of more than 5,000 ten-thousand yuan, and a team of 170 people. Its core team comes from well-known domestic semiconductor OEM manufacturers and has more than 15 years of experience in semiconductor component manufacturing. The company focuses on domestic substitution in three core material directions, Ceramic, Quartz, and Silicon, and its products are used in mainstream semiconductor process equipment for Etch, CVD, PVD, and Diffuse processes. It can also process Sapphire, AlN, SiC, PI, ZrO₂, machinable ceramics, conductive ceramics, and PEEK parts and provides one-stop precision manufacturing across multiple materials. Core equipment includes precision MC, CNC grinders, and class 100/class 1000 cleaning lines, while the factory has production workshops and cleanroom facilities and covers forming, CNC machining, grinding, polishing, sintering, cleaning, and inspection processes. For Etch equipment, the company supplies chamber covers, masking rings, domes, robot parts, and nozzles; for CVD it supplies high-purity quartz and ceramic chamber parts; for PVD it supplies silicon shower-head electrodes and polysilicon exhaust fans and rings; and for Diffuse, epitaxy, and RTP it supplies quartz furnace tubes, quartz boats, epitaxial bell jars, and insulation barrels. The company is recognized as a national High-Tech Enterprise, has passed the technology-based SME evaluation of the Ministry of Industry and Information Technology, and is listed as an innovative SME in Zhejiang Province. Its stated values are people orientation, pursuit of excellence, quality first, and safety first, with emphasis on employee development, product precision and reliability, strict process control, and safe production. Zhejiang Yuanxin Advanced Material Co., Ltd. supplies critical components and complete integrated solutions for semiconductor manufacturing applications.
Exhibits
Ceramic components are applicable to etching systems, ion implanters, thin-film vapor deposition tools, and atomic layer deposition equipment; Quartz components are used in etching, epitaxy, diffusion, and rapid thermal processing systems; and Silicon components are applied to etching and epitaxy equipment. Ceramic parts for semiconductor Etch and CVD chamber positions are designed for high plasma resistance, dielectric strength, corrosion resistance, purity, and reliability. The Ceramic Window transmits RF or microwave energy into a plasma etching chamber, has low loss tangent and high transmission at RF/microwave frequencies, resists plasma etching environments, and supports atmospheric-plasma alumina coating or AD alumina coating. The Cover Ring / Liner covers wafer edges and protects chamber components, is offered in 6-inch, 8-inch, and 12-inch specifications, and can use an ARC aluminum thermal-spray surface. The Ceramic Dome is used to create a clean, inert, protected chamber environment for deposition equipment, while the Baffle / Nozzle is designed to control gas flow and distribute gas uniformly into the etching chamber. Blade / Finger / Robot ceramic handling parts are used for contact or non-contact wafer handling and movement in atmospheric or vacuum environments and emphasize dimensional precision, thermal stability, smooth wear-resistant support surfaces, and antistatic needs. Custom ceramic structural parts can be precision-machined according to customer equipment models and process requirements. Quartz parts are controlled for purity, bubble inclusions, and surface metal and particle contamination; epitaxy products include quartz bell jars and liner rings with high-temperature deformation resistance; and diffusion/RTP products include quartz furnace tubes, quartz boats, quartz insulation barrels, and other quartz parts requiring high purity and thermal stability. Silicon parts use high-purity monocrystalline or polycrystalline silicon for plasma resistance and low metal contamination, including shower-head electrodes for gas distribution, polysilicon exhaust fans and rings for flow guidance and chamber protection, and high-purity single-crystal silicon rings with purity of at least 99.9999% for edge protection and sealing in etching equipment. Beyond Ceramic, Quartz, and Silicon, custom parts can be made from Sapphire, AlN, SiC, PI, ZrO₂, machinable ceramics, conductive ceramics, and PEEK. The custom-service process covers requirements communication, solution design and quotation, precision manufacturing with ongoing communication, and acceptance testing and continuing technical support. The company also supplies Quartz components for diffusion processes.
Capabilities and products
- ceramic chamber covers with optional alumina coatings
- 6/8/12-inch ceramic cover rings
- 6/8/12-inch ceramic liner rings
- ceramic domes for deposition equipment
- ceramic gas nozzles for etching equipment
- ceramic wafer handling blades and fingers
- precision machining of customized ceramic structural parts
- quartz parts for etching equipment
- quartz bell jars for epitaxy processes
- quartz liner rings for epitaxy processes
- quartz furnace tubes for diffusion processes
- quartz boats for diffusion processes
- quartz thermal-insulation cylinders for diffusion processes
- quartz parts for RTP equipment
- silicon shower head electrodes for semiconductor etching
- polysilicon exhaust fans (C-Shroud) for semiconductor chambers
- polysilicon exhaust rings for semiconductor chambers
- single-crystal silicon rings for etching equipment with purity ≥99.9999%
- precision machining of sapphire parts
- precision machining of aluminum nitride (AlN) parts
- precision machining of silicon carbide (SiC) parts
- precision machining of PI parts
- precision machining of zirconia (ZrO₂) parts
- precision machining of machinable ceramic parts
- precision machining of conductive ceramic parts
- precision machining of PEEK parts
- CNC machining of semiconductor parts
- grinding of semiconductor parts
- polishing of semiconductor parts
- sintering of semiconductor parts
- semiconductor part cleaning in Class 100/1000 environments
- forming of semiconductor parts
- ceramic gas baffles for etching equipment
- flame working of shaped quartz parts