At a glance
| Booth | M0942 |
| Country | TW |
| Website | www.vatvalve.com |
Company profile
VAT Taiwan Co, Ltd. presents VAT as a worldwide leader in vacuum-valve technology, with development, laboratory and assembly activities at its headquarters in Switzerland. VAT operates specialized product groups and industrial manufacturing according to ISO9001, focusing on vacuum-field solutions for customers and on high-vacuum technologies used in semiconductor, display and digital-technology production.
Exhibits
In semiconductor manufacturing, VAT focuses on high-precision control and isolation of vacuum and gas flows, with valve functions designed for precise repeatability over a high number of cycles, precise volume flows over defined time intervals and consistent, reliable sealing; VAT states that its control and isolation valves set the standard for this performance. The control-and-isolation portfolio is tailored to application requirements and specific customer needs, with adaptable opening and closing cycles, stable adaptive sealing, advanced controller technology for high-precision control, particle activation and release prevention, and manufacturing quality intended to keep defined performance parameters stable for each valve. Relevant products include the UHV Gate Valve with “10.81 × 10-10 mbar to 1.2 bar (abs)”, Gate Valve with “12.11 × 10-7 mbar to 1.6 bar (abs)”, HV Angle Valve with “26.41 × 10-8 mbar to 5 bar (abs)”, HV Butterfly Control Valve with “61.31 × 10-8 mbar to 1.2 bar (abs)”, HV Butterfly Control and Isolation Valve with “61.61 × 10-8 mbar to 1.2 bar (abs)”, HV Butterfly Control Valve with “61.71 × 10-6 mbar to 1.2 bar (abs)”, HV Angle Control Valve with “62.01 × 10-8 mbar to 1.4 bar (abs)”, HV Control Gate Valve with “64.21 × 10-8 mbar to 2 bar (abs)”, UHV Control Gate Valve with “64.81 × 10-10 mbar to 1.6 bar (abs)”, HV Pendulum Control Valve with “65.31 × 10-8 mbar to 1.2 bar (abs)”, HV Pendulum Control Valve with “65.51 × 10-8 mbar to 1.2 bar (abs)”, Symmetrical Control Valve with “67.01 × 10-8 mbar to 1.2 bar (abs)” and HV Control and Isolation Valve Combo Unit with “95.31 × 10-8 mbar to 1.2 bar (abs)”. Within those series, VAT lists solutions for standard UHV and vacuum isolation, flexible and reliable HV angle isolation, fast precise downstream-pressure control, combined control and isolation, exceptionally low-conductance controllability, high-pressure and high-temperature service, high-cycle vacuum control and isolation, optimized downstream pressure control and vacuum isolation in SEMI and display systems, corrosive etching at high process pressure and low volume flow, flow-optimized pressure control, and compact high-performance control-and-isolation functions; related products include Customized High Performance Motion Components, Integrated High Performance Vacuum Modules and Edge Welded Metal Bellows. For semiconductor production, VAT emphasizes particle avoidance and reliability because very small particles can damage wafers and reduce yield, and states that its vacuum-valve solutions support quicker valve performance, extended tool uptime and lower operating cost for a faster return on investment. The semiconductor application areas listed are Process Control & Isolation, Substrate Transfer and Sub-Fab Systems, and the portfolio includes a high-pressure and high-temperature solution for corrosive etching applications with high process pressure and low volume flows.
Capabilities and products
- UHV/HV gate valves
- HV angle valves
- HV butterfly control and isolation valves
- HV/UHV control gate valves
- HV pendulum control valves
- symmetrical vacuum control valves
- vacuum control and isolation combo valves
- customized high-performance motion components
- integrated high-performance vacuum modules
- edge-welded metal bellows