At a glance
| Booth | M0942 |
| Country | TW |
| Product categories | Other |
| Website | www.vatvalve.com |
Company profile
VAT "innoVATion", worldwide leader in vacuum valve technology. Development, laboratory & assembling are in the HQ in Switzerland. Specialized product groups and industrial manufacturing according to ISO9001, forever offering with the best to customer in vacuum field.
Exhibits
First-time presence at Silicon Saxony Days 2026 brings VAT vacuum valve expertise to one of Europe’s leading semiconductor hubs Experience firsthand how VAT vacuum solutions power precise, reliable, and efficient semiconductor manufacturing. Step into the future of semiconductor manufacturing with VAT technologies High-precision control and isolation of vacuum and gas flows is essential in semiconductor manufacturing. In both upstream and downstream processes, all valve functions must guarantee precise repeatability over a high number of cycles. The result: precise volume flows over defined time intervals and consistent, reliable sealing. VAT control and isolation valves set the standard here. The VAT vacuum valve portfolio for control and isolation in semiconductor manufacturing is always tailored to the special requirement. Depending on the requirement and area of application, the performance parameters of the individual series and valve technologies used are always adapted to the specific customer needs in each case. Key features include adaptable opening and closing cycles, stable adaptive sealing, advanced controller technology that allows high-precision control, particle activation and release prevention, and high manufacturing quality that guarantees defined, stable performance parameters for each valve manufactured. To learn more about how a VAT vacuum valve solution can solve control and isolation challenges, select from the series listed below. The high pressure and high temperature solution Ideal for corrosive etching applications with high process pressure and low volume flows VAT is a global leader in the development of high vacuum solutions that are essential for the production of semiconductors, displays, and digital technologies.
Capabilities and products
- VAT control and isolation valves for semiconductor manufacturing
- adaptable opening and closing cycles
- advanced controller technology for high-precision control
- consistent and reliable sealing
- high-precision control of vacuum and gas flows
- isolation of vacuum and gas flows
- particle activation and release prevention
- precise volume flows over defined time intervals
- stable adaptive sealing
- vacuum valve technology