At a glance
| Booth | M1254 |
| Country | TW |
| Product categories | Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment · Etching; Stripping; Ashing - Dry and Wet Equipment |
| Website | www.uvat.com |
Company profile
UVAT Founded in 2002, is a group of specialists with years of experience in vacuum technology that are constantly engaged themselves in the design and development of Physical Vapor Deposition (PVD), and Dry etching(ICP 、 RIE 、 Ion bean 、 Micro wave). We keep developing new plasma technology continuously, and also research new field application, thin Film Properties, and hardware development with customer. UVAT can do comprehensive service including sample provided, Mass Production system planning, EFEM design, and equipment modification for function improvement. Moreover, UVAT own after service team to support Full Service to customer. We also provide sputtering equipment and coating OEM service if necessary. UVAT’s professional technology cover industry fields icluded 5G communication, PCB, IC Substrate, Semiconductor, IC Package, Tablets NB, Smart, Automobile parts, LED… etc.
Capabilities and products
- EFEM design
- Physical Vapor Deposition (PVD) design and development
- coating OEM service
- dry etching design and development for ICP, RIE, ion beam and microwave
- equipment modification for function improvement
- mass production system planning
- plasma technology development
- sputtering equipment
- thin film properties research
Related product topics
- Equipment Refurbishment & Repair
- EFEM Automation Modules
- Thin-Film Coating Systems
- PECVD & PVD Coating Systems
- Sputtering Coating Equipment
- Vacuum Sputtering Deposition Systems
- RIE and Deep Etch Systems
- Plasma Process Equipment and Technology
- Ion Beam Milling and Trimming Equipment
- Energy and Power Management Systems