At a glance
| Booth | P5206 |
| Country | TW |
| Website | www.ulvac.com.tw |
Company profile
With a history of 70 years, ULVAC Group utilizes the world's highest level of vacuum technology to pursue the numerous possibilities of vacuum technologies, providing equipment, components, materials, analytical instruments, and customer solutions in all domains. Seizing the opportunity of the change, taking advantage of the synergy and innovation of the group, and responding to the needs quickly, ULVAC Group creates a visible and abundant future with invisible vacuum technologies.
Exhibits
從各種微型感測器到流路模組、光學電晶體和生物微機電，ULVAC擁有豐富的使用實績並有能力對應所有MEMS製造技術。 PECVD用於沉積多種薄膜，許多製程元件需要PECVD來建立高密的光罩或是緻密的保護膜。ULVAC的化學氣相沉積設備專門用於生產高均勻性和高速率薄膜，可控制薄膜特性，如折射率、應力、電特性和濕化學蝕刻速率。ULVAC PECVD有高密度電漿源, 並可依照製程需求，有高溫低溫兩種成膜機種供選擇，業界實績強， 設備架構從小型至大型的layout靈活度高，可依照不同機型對應2inch~12inch wafer或方形基板。
Capabilities and products
- vacuum analytical instruments
- vacuum components
- vacuum materials
- vacuum process equipment