At a glance
| Booth | P6204 |
| Country | TW |
| Website | www.thalessystem.com.tw |
Company profile
Thales System Corporation was established in 2010 to give customers more choices and services in high-precision analyzers, with a business focus shaped by continuously changing semiconductor-industry requirements. The company states that it continually improves its technical skills and provides optimization services, while also importing new products and establishing laboratories in Taiwan and Shanghai to maintain efficient service quality. Its service scope covers sales, calibration, and maintenance of gas analyzers; gas-analyzer system integration; sales and maintenance of high-purity gas purification equipment; point-of-use gas-purifier sales and regeneration; gas-quality analysis; gas-piping quality analysis and supervision; and instrument rental. Thales System also provides monitoring instruments and systems for environmental monitoring, industrial safety, industrial-process control, and toxic-chemical emergency response, together with system design, instrumentation piping, station construction, system assembly, and data-processing integration planning. Named project references on its company site include 南亞科技, 大陽日酸, 台灣美光, 亞東, 台積電, and 聯華電子.
Exhibits
Gas-analysis technologies offered by Thales System include tunable diode laser spectroscopy, zirconia oxygen analysis, infrared gas analysis, flue-gas analysis, dust monitoring, gas chromatography, continuous emissions monitoring systems, hydrogen-purity analysis, and gas-density systems. Its named gas-analyzer lineup includes Toray products, PEAK FID, CIC FTIR, SEVOMEX DF-310E, DF-560E and DF-550E, AMETEK CG 1100 and CG 1000, and AMETEK 5920 and 5910 instruments. Gas purifiers are applied to ultra-high-purity process-gas supply in high-tech industries and to purified gas for general applications, with the stated purpose of supporting process quality, yield, and production efficiency. For semiconductor advanced processes, the AMC micro-contamination monitoring system uses PICARRO analyzers for impurities including NH3, HF, HCl, and VOC and provides continuous monitoring intended to protect process yield. The AMC product list includes SI9110 VOC, SI5450 SO2, SI3401 HF NH3 HCl, SI2306 HF NH3, SI2205 HF, SI2108 HCl, SI2104 H2S, and SI2103 NH3 analyzers for different airborne molecular contaminants. Thales System also lists ALD advanced-process chemical solutions and instrument-system design and assembly engineering within its semiconductor and high-tech process offering. For instrumentation projects, services include overall system design, instrument piping and station-room construction, system assembly, and planning for data-processing system integration. Gas-piping QA/QC work uses automatic orbital welding and strict ultra-high-purity construction and QA/QC procedures, with testing that includes helium leak detection, moisture, oxygen, particle measurements, and other required gas-phase impurity tests. On-site work also includes gas sampling and sample analysis, gas-piping quality analysis and supervision, and gas-quality analysis for process and supply-system verification. Contract maintenance ranges from minor instrument adjustment and calibration to major repair according to the agreed maintenance scope, providing ongoing support for analyzer installations. Together, analyzer sales and calibration, purification equipment, POU purifier regeneration, AMC monitoring, piping QA/QC, system engineering, and data integration form a service chain for semiconductor process-gas quality and micro-contamination control.
Capabilities and products
- sales, calibration and maintenance of gas analyzers
- gas-analyzer system integration
- sales and maintenance of high-purity gas purification equipment
- sales and regeneration of POU gas purifiers
- gas quality analysis
- gas-pipeline quality analysis and quality supervision
- AMC micro-contamination control and monitoring systems
- N2H4 reducing-agent gas supply systems for ALD processes
- instrument-system design and assembly engineering
- pipeline QA/QC engineering and on-site gas sampling analysis
- contract maintenance for analytical instruments