At a glance
| Booth | L0400 |
| Country | JP |
| Website | takano-net.com.tw |
Company profile
Takano Co., Ltd. provides inspection and metrology for advanced package applications and semiconductor manufacturing. Its semiconductor inspection and metrology portfolio spans non-pattern surface inspection, wafer-pattern inspection, high-speed bump-height inspection, and wafer-surface thin-film analysis inspection. The company's film-inspection offering also combines proprietary camera development, image-processing technology, inspection judgment, defect review, statistical processing, and configurable display functions for production-line inspection.
Exhibits
The WM-7SR is a Non-Pattern Surface Inspection System specified for 2inch~8inch, while the WM-10R is a Non-Pattern Surface Inspection System specified for 4inch~12inch. The Vi Series is a Wafer Pattern Inspection System, ALTAX is a Hi-speed Height Inspection System for Bump Height, and Thinspector is a Wafer Surface Thin Film Analysis Inspection System. For film inspection, the Hawkeyes ELITE uses a camera developed and manufactured by Takano Co., Ltd. with the stated goal of achieving an industry-high level of high-speed, high-definition inspection. The listed line-speed and detection-size combinations include 100m/min with 20μm and 200m/min with 40μm. Hawkeyes ELITE applies proprietary image-processing technology and processes multiple algorithms in parallel to detect defects. Examples shown for detected conditions include black spots, unevenness, streaks, scratches, protrusions, dents, horizontal streaks, and concave defects. Takano Co., Ltd. states that images captured with its camera render a shape closer to the actual defect clearly, while images from a general commercially available camera may show the same defect in a fragmented form. The inspection workflow also supports AI defect classification using images acquired by the Takano camera. Inspection targets listed for the film system include hole defects such as Court detachment and Pin Hole, stripe defects such as coating streaks, wrinkles, and roller marks, uneven-surface defects such as foreign matter, scratches, and bubbles, and unevenness defects such as coating unevenness and dents. CCD effective line pixel counts are listed as 2,000pix, 4,000pix, 7,400pix, and 16,000pix. The system includes a control and statistics PC, with the listed specification showing OS:Windows 7. Inspection software functions include inspection judgment processing, noise reduction processing, spatial filter, and defect map display. Review functions include a defect list with map or coordinate data, defect image display, trend graph, and statistical processing. Hawk view duplex provides multiple-view connection management and information-delivery control. Takano Co., Ltd. also states that screen displays and added functions can be customized. Listed applications include ceramic capacitors using Green sheet, battery materials including separators and metal foil, optical film, and electronic components using PI, various metal foils, photosensitive materials, and resin films. Together, the wafer-inspection model range and Hawkeyes ELITE film-inspection functions cover surface, pattern, height, thin-film, defect-image, defect-map, trend, and statistical analysis needs across semiconductor, battery-material, optical-film, and electronic-component production environments.
Capabilities and products
- non-pattern wafer surface inspection system
- wafer pattern inspection system
- high-speed bump-height inspection system
- wafer-surface thin-film analysis inspection system
- high-speed high-definition film defect inspection
- AI defect classification