At a glance
| Booth | S7541 |
| Country | JP |
| Product categories | Film Thickness; Thickness; Uniformity Measurement; Ellipsometer · Spectrometers; Fourier Transform Infrared (FTIR); Attenuated Total Reflectance FTIR (ATR-FTIR); Auge · Wafer; Substrate Metrology; Topology; Nanotopography; Flatness Measurement; Crystalline Orientation · X-ray; XRF; 3-D X-Ray; LEXES Systems · Ingots |
| Website | www.systems-eng.co.jp/products/semi_ftir_products.html |
Company profile
Support the semiconductor industry with optical measurement. Systems Engineering manufactures a new generation "FT-IR SE 50 series" semiconductor material characterization tools equipped with Thermo Fisher Scientific's research grade FTIR and JEL's self-transport system. "FT-IR SE-50 series" focuses purging performance and measurement efficiency with N2, and it makes the industry's highest level of high-precision measurement. We have wide variety of applications to suit customers needs in "SE-50 series". 【Wafer measurement】 ・EPI Thickness ・SiC Thickness ・SOI Thickness ・Carbon & Oxygen in Silicon ・Boron & Phosphorus in BPSG Films ・Hydrogen in Silicon Nitride Films ・Fluorine in SiO2 Films ・Thickness of non-diffusion layer film 【Ingot measurement】 ・Oxygen concentration Systems Engineering introduce the feature of SE-50 series in our booth(No.S7541). Please feel free to take an opportunity to visit us!!
Capabilities and products
- EPI thickness wafer measurement
- FT-IR SE 50 series semiconductor material characterization tools
- SOI thickness wafer measurement
- SiC thickness wafer measurement
- boron and phosphorus in BPSG films measurement
- carbon and oxygen in silicon wafer measurement
- fluorine in SiO2 films measurement
- hydrogen in silicon nitride films measurement
- ingot oxygen concentration measurement
- non-diffusion layer film thickness measurement