At a glance
| Booth | S7541 |
| Country | JP |
| Website | www.systems-eng.co.jp/products/semi_ftir_products.html |
Company profile
Systems Engineering Inc. was established in Apr-95 with paid-in capital of 20,000,000 yen, annual revenue of 600,000,000 yen, and 15 employees. The company operates a head office in Tokyo, a Western Branch Office in Osaka, a Monozukuri Technology Center in Itabashi, a Hachioji factory, and a photometric test and evaluation room at Yamagata University's Organic Electronics Innovation Center in Yonezawa. Its business covers analytical instruments, optical instruments, measuring instruments, related peripheral equipment, accessories, and software, together with technical services that include development, manufacturing, and contract measurement and analysis. Since establishment, Systems Engineering Inc. has developed technical capabilities in optical measurement with integrating spheres and in spectroscopic measurement across IR, UV, and VIS, while also supplying integrated accessories and technical support. Its experience spans analytical instrumentation, optical measurement, and photonics, supported by a nationwide network of users in academia, government, and industry and by in-house technical support capabilities. Systems Engineering Inc. is a member of the Japan Analytical Instruments Manufacturers' Association (JAIMA), The Japan Society of Applied Physics, The Spectroscopical Society of Japan, The Japanese Photochemistry Association, The Remote Sensing Society of Japan, The Japan Society of Infrared Science and Technology (JSIR), and the Japan Association of Forensic Science and Technology (JAFST). The company's handled product range includes integrating spheres, standard reflectance plates, LED measurement systems, goniophotometric measurement systems, semiconductor FT-IR, OCT systems and light sources, FT-IR spectrometers and accessories, Raman spectrometers, near-infrared spectrometers, UV-visible spectrometers, BRDF and BTDF measurement equipment, optical materials, polarimeters, refractometers, density and specific-gravity meters, elemental analyzers, hydraulic presses and dies, fiber optics, sampling tools, NMR liquid-He evaporation-prevention equipment, and data-analysis software. Its English company profile also identifies optical measurement systems and accessories, optical spheres, goniometers, LED measurement systems, FT-IR spectrometers and accessories, SEMI-related equipment, fiber optics, photo-acoustic detectors, OCT systems, SS-OCT engines, semiconductor material characterization systems, and AOTF portable NIR spectrometers. Major overseas principals and dealership relationships named by Systems Engineering Inc. include Specac Ltd., Labsphere, Inc., Axsun Technologies, Inc., DAMAE MEDICAL, NIEKA, Radiant Vision Systems, LLC, GL Optic, LLTech, BaySpec, PYREOS, art photonics GmbH, IBZ Messtechnik GmbH, Gasera Ltd., PIMACS CO., LTD., Agilent Technologies, Inc., Thermo Fisher Scientific, Inc., Bruker Optics K.K., and PerkinElmer Japan Co. Ltd. Government and public-sector customers named by the company include Japan Aerospace Exploration Agency (JAXA), National Research Institute of Police Science, forensic science research institutes, Tokyo Metropolitan Industrial Technology Research Institute, Meteorological Research Institute, National Research Institute for Earth Science and Disaster Prevention (NIED), National Institute of Advanced Industrial Science and Technology (AIST), Japan Atomic Energy Agency, National Institute for Materials Science, and the Ministry of Defense. University customers named by the company include Osaka University, Ochanomizu University, Kyushu University, Kyoto University, Keio University, Tokyo Metropolitan University, Chiba University, University of Tsukuba, Tokyo Institute of Technology, University of Tokyo, Tohoku University, Nagoya University, Niigata University, Hiroshima University, Hokkaido University, Yokohama National University, and Waseda University. Industrial customers named by Systems Engineering Inc. include Ube Industries, SS Pharmaceutical, Omron, Kao, Kansai Paint, Canon, Kyocera, Shiseido, Citizen Electronics, Citizen Watch, Sharp, Sony, Daiichi Sankyo, Dainippon Screen Manufacturing, Toshiba, Toyoda Gosei, Toyota, Toray, Nikon, Nissan, Nitto Denko, Zeon, NEC, Panasonic, Hamamatsu Photonics, Hitachi, Bridgestone, Honda, Mitsubishi Chemical, Mitsubishi Plastics, Mitsubishi Electric, Rohm, Fujifilm, and Eisai.
Exhibits
Systems Engineering Inc. supports semiconductor manufacturing with optical measurement and manufactures the FT-IR SE-50 series of semiconductor material characterization tools using Thermo Fisher Scientific research-grade FTIR technology and JEL wafer-transport systems. The FT-IR SE-50 series emphasizes N2 purging performance and measurement efficiency and provides the industry's highest level of high-precision measurement. Wafer applications include EPI thickness, SiC thickness, SOI thickness, and thickness measurement of non-diffusion-layer films. Additional wafer applications include carbon and oxygen measurement in silicon, boron and phosphorus measurement in BPSG films, hydrogen measurement in silicon nitride films, and fluorine measurement in SiO2 films. For ingots, the FT-IR SE-50 series supports oxygen-concentration measurement. For semiconductor-factory evaluation, the line includes stage systems, open-cassette configurations, SMIF, FOUP, and edge-grip equipment for different wafer sizes and applications, including EPI film thickness, carbon and oxygen concentration in silicon, phosphorus and boron concentration in BPSG, hydrogen concentration in SiN, fluorine concentration in silicon oxide films, and GEM/SECS upper-level communication. Systems Engineering Inc. provides application support for this semiconductor FT-IR line and supports migration from the Nicolet ECO series, the IR-EPOCH series, and X-ray fluorescence equipment. The company also accepts customization for ingot oxygen-concentration measurement, special automation, and optical attachments. Its custom-made track record includes LED goniophotometric and spectral measurement equipment, LCD optical-characteristic measurement stages, photothermal deflection spectroscopy (PDS), photoacoustic spectroscopy (PAS), constant photocurrent measurement (CPM), constant-energy spectroscopic light sources, spectroradiometers, total-luminous-flux measurement systems, photometric systems, and goniophotometric systems. Additional custom-made work includes solar-spectrum measurement equipment, HID lamp arc-bending measurement equipment, surface-plasmon-resonance (SPR) measurement equipment, compact Raman spectroscopy equipment, fiber FFP measurement equipment, LIF trace-analysis equipment, femtosecond delay optical systems, control and measurement software, control and signal-processing equipment, and semiconductor-factory FT-IR systems. The technical equipment range further covers LED and O-EL quantum-efficiency and emission-efficiency measurement, LED optical-characteristic measurement, LCD and FPD optical inspection, backlight total-luminous-flux and optical-characteristic measurement, luminance and color-distribution measurement, automatic and manual XY stages, stage-control software, lamp inspection, integrating-sphere and goniometric total-flux measurement, illuminance sensors, Raman and fluorescence spectroscopy, absorption-spectrum measurement, infrared spectroscopy accessories, visible-to-infrared spectrometer accessories, infrared optical systems and sources, FT-IR external optics, and PMT cooling housings. Among manufactured products available for worldwide shipment, ENG_Heated_and_SealedGG supports in-situ FT-IR analysis of anaerobic lithium-ion-battery electrode interfaces by allowing its top plate to be taken into a glove box, placing the sample on an ATR crystal, sealing it in the small chamber above the crystal, and returning the sealed anaerobic sample to the spectrometer. GoldenEyeIII-1 is a high-spec integrating sphere designed to mount in an FT-IR spectrometer sample chamber. Heating_and_Cooling_Stage is offered in three heating or heating-and-cooling stage types and fits the sample compartment of most FT-IR models. SBIR_SBIR-Plus uses SuperBlack IR, a light-absorbing suede film made of polyurethane resin with abrasion resistance. NIEKA is presented for ICP and XRF sample preparation and with a full temperature range for analytical methods. SE50A-ECO 300SFE combines Thermo Fisher Scientific FT-IR measurement technology with JEL's edge-grip wafer-handling system, SE50A_ECO 200DS combines the FT-IR technology with JEL wafer handling, SE50A_ECO 200SMIF combines it with a JEL Sorter System, and SE50S-ECO-02S-1 combines it with a single-wafer handling system. The OCT System provides non-destructive, non-contact tomographic imaging, uses infrared light without radiation effects, supports high-resolution 2D and 3D imaging, enables real-time 2D display through high-speed laser scanning, and can acquire a 3D image within a few seconds. SE50A-ECO 200DSMIF is compatible with 8-inch wafers and combines Double SMIF, a vacuum-suction robot transfer system, OHT/AGV availability, and an intuitive graphical user interface. SE50A-ECO 200SS supports 4-8 inch wafers with a single cassette, a vacuum-suction robot transfer system, an intuitive graphical user interface, and a space-saving configuration. SE50A-ECO 300SF supports 8-12 inch wafer measurement with a single FOUP, vacuum-suction robot transfer, OHT/AGV compatibility, intuitive software control, and a safety-standard-compliant model with SEMI-S2 and CE marking. SE50-OIP supports φ200mm/300mm ingots up to 3000mm long and provides automatic multipoint measurement with an intuitive graphical user interface. SE50S-ECO is a stage-type system for 2-8 inch or 6-12 inch wafers with automatic multipoint wafer measurement and an intuitive graphical user interface.
Capabilities and products
- semiconductor-material FT-IR characterization tools
- EPI/SiC/SOI film-thickness measurement
- carbon and oxygen measurement in silicon
- boron and phosphorus measurement in BPSG films
- hydrogen measurement in silicon nitride films
- fluorine measurement in SiO2 films
- ingot oxygen-concentration measurement
- integrating-sphere optical measurement
- IR/UV/VIS spectroscopic measurement
- custom LED goniophotometric and spectral measurement equipment
- custom LCD optical-characteristic measurement stages
- OCT 2D/3D tomographic imaging systems
- in-situ FT-IR analysis of anaerobic lithium-ion-battery interfaces
- FT-IR heating/cooling stages
- ICP/XRF sample-preparation equipment