At a glance
| Booth | S7133 |
| Country | CN |
| Website | www.supermag.com |
Company profile
Suzhou Supermag Intelligent Technology Co.,Ltd. develops high-end magnetic-levitation bearingless equipment based on advanced Maglev Technology and provides high-purity, low-shear solutions for semiconductor, bioprocessing, chemical, energy, and ultra-high-vacuum applications. Its core product families include maglev bearingless motors, maglev fluid-transport systems, maglev stirring systems, maglev wafer rotation systems, maglev pumps, and magnetically levitated turbomolecular pumps. For semiconductor manufacturing, the company provides highly clean maglev wafer-rotation systems, pump systems, and turbomolecular pumps together with technical support for advanced chip-manufacturing processes. For bioprocessing, it provides single-use and reusable maglev pumps, maglev stirring systems, and flow sensors for shear-sensitive fluids including cell-based vaccines, biologics, and gene therapies. For chemical processing, its maglev pumps and stirring systems are designed to reduce equipment-contamination risk and handle high-temperature and corrosive chemical fluids during mixing and stirring. For energy applications, it supplies high-efficiency maglev rotor and bearing solutions for wind turbines and other turbine systems, targeting equipment stability, energy-conversion efficiency, operational life, and economic performance. Suzhou Supermag Intelligent Technology Co.,Ltd. lists 20 years of technological expertise, more than 50 R&D professionals, and two major production and office sites. Its technical approach includes rotor-and-stator structures for different applications, specialized displacement-sensor designs, proprietary control-system design, and remote tuning and technical support. The company states that it maintains a certified quality system, including ISO'9001 Quality Management System Certification for the company and CE, SEMI S2, and other international certificates for products. It also states that it has access to the supply chains of several multi-billion-dollar customers and provides timely after-sales service and technical support. For its core magnetic-levitation technology, the company reports full independent intellectual-property rights and 105 patents, including 8 PCTs and 49 invention patents. Its core R&D expert team has overseas academic research experience in the United States, Germany, and Japan, and one of its notable milestones is Maglev LVAD, described as one of only two in the world. Suzhou Supermag Intelligent Technology Co.,Ltd. combines these capabilities with product selection, product customization, services, support, and remote technical assistance for customers deploying magnetic-levitation equipment.
Exhibits
The semiconductor solution portfolio covers coating and developing, Rapid Thermal Processing, wet etching, dry etching, ion implantation, thin-film deposition, single-wafer wet cleaning, electroplating, and Chemical Mechanical Planarization. In coating and developing, the Supermag® SCM Maglev Wafer Rotation System provides stable speed and acceleration for photoresist spin coating, while the SCP Maglev Pump System can deliver photoresist, developer, and other chemicals. In Rapid Thermal Processing, the SCM Maglev Wafer Rotation System addresses vacuum-chamber sealing and avoids friction particles, supporting process yield. In wet etching, the SCP Maglev Pump System provides a stable flow of etching solution to improve process controllability and uniformity. For dry etching, the SCT Maglev Turbomolecular Pump operates without oil or mechanical friction to provide an ultra-clean, high-vacuum environment and reduce the influence of contaminants on reactions. For ion implantation, the SCT pump provides sealing, high vacuum, clean operation, and fast pumping speed to support production purity and stability where airborne impurities can damage implantation equipment. For thin-film deposition, the SCT pump avoids oil and gas contamination associated with conventional mechanical bearings and operates without mechanical friction, supporting cleaner high-vacuum conditions and smoother deposited films. During single-wafer cleaning, the SCM rotation system eliminates the need for dynamic chamber sealing and uses a hollow-rotor layout, while the SCP pump supplies ultra-clean cleaning solution at a stable flow rate. In electroplating, the SCP Maglev Pump System provides stable electrolyte flow to support plating uniformity. During CMP slurry delivery, the SCP Maglev Pump System provides stable polishing-slurry flow with low shear force and an anti-crystallization effect, addressing particle generation and scratch risk associated with high-shear conventional pumps. The SCM Maglev Wafer Rotation System is designed to support and rotate wafers in semiconductor equipment using integrated magnetic-bearing and motor-control technology, with the rotor levitated without friction, dynamic seals, or particle generation. SCM applications include oxidation, diffusion and annealing, RTP, RTA, RTO, RTN, ALD, CVD(DPN), single-wafer cleaning, MOCVD, etching, and spin coating. The SCM platform uses intelligent control software with remote tuning and communication to PLC and PC upper-level systems, supports adjustable and precise speed control, and can automatically return to rotational zero with adjustable height. SCM 300C/300D supports 6/8/12-inch wafers, a 20-2500 RPM adjustable speed range, and rated power of 350W/2000W. The SCP Maglev Pump System is designed for high-purity solutions and special-media transport, with a rotor suspended in the liquid to avoid mechanical friction and particle generation while providing low shear and low extractables. The SCP pump provides a wide flow-and-head range, low pulsation, intelligent control, compact size, real-time speed adjustment, forward and reverse rotation, and operation without dynamic seals to reduce leakage risk. The semiconductor pump family includes SCP 30 with up to 15000 rpm, 1 bar, and 7.7 L/min; SCP 200 with up to 10000 rpm, 2.6 bar, and 21 L/min; and SCP 600 with up to 9000 rpm, 3.2 bar, and 75 L/min. The same family includes SCP 2000 with up to 10000 rpm, 4.2 bar, and 140 L/min, and SCP 4000 with up to 8000 rpm, 6.3 bar, and 280 L/min. The SCT Maglev Turbomolecular Pump uses magnetic-bearing technology to levitate the rotor without contact, eliminating mechanical friction and lubricating oil while providing clean, reliable, low-vibration ultra-high-vacuum operation. Its semiconductor and related applications include wafer processing, etching, thin-film deposition, ion implantation, research, and photovoltaics. The SCT platform supports ultimate vacuum in the 10-7 Pa to 10-8 Pa range, high rotor speed, split or integrated controller-and-pump configurations, intelligent control software, remote tuning, and monitored operating data. SCT 550 has a baked ultimate pressure of 10-7 Pa to 10-8 Pa, rated speed of 45000 rpm, and pumping speeds of N2: 320 L/s, He: 340 L/s, and H2: 320 L/s. SCT 900 has a baked ultimate pressure of 2*10-7 Pa, rated speed of 26000 rpm, and pumping speeds of N2: 2200 L/s, He: 2000 L/s, and H2: 1800 L/s. Across its product lines, Suzhou Supermag Intelligent Technology Co.,Ltd. combines highly clean rotary motion, low-shear fluid delivery, magnetic-levitation stirring, and oil-free, friction-free high-vacuum pumping for semiconductor and other demanding process environments.
Capabilities and products
- maglev bearingless motors
- maglev fluid transport systems
- maglev stirring systems
- magnetically levitated turbomolecular pumps
- maglev wafer rotation system for semiconductor equipment
- maglev delivery of high-purity photoresist and process chemicals
- low-shear maglev CMP slurry delivery
- oil-free frictionless ultra-high-vacuum pumping