At a glance
| Booth | S8144 |
| Country | CN |
| Website | www.jingtuo-tech.com |
Company profile
Suzhou Jingtou Semiconductor Technology Co., Ltd. is located by Yangcheng Lake in Suzhou Industrial Park and integrates research and development, manufacturing, sales and service for semiconductor ozone equipment as a high-tech enterprise. The company states that it has focused on high-purity, high-concentration ozone technology for 13 years and develops high-concentration ozone system solutions for industrial users. Its in-house infrastructure includes Class 1000 and Class 100 cleanrooms together with test platforms, supporting the development, manufacture and validation of ozone equipment and systems. Products are listed with ISO9001, ISO14001 and ISO45001 management-system certifications as well as SEMI-S2, S6, S23, F47, Hazop, ETL and CE certifications. Suzhou Jingtou Semiconductor Technology Co., Ltd. reports more than 60 authorized patents, identifies itself as the first domestic ozone-equipment supplier to pass FAB customer certification, and states that it undertakes a national-level R&D project addressing a critical technology bottleneck. The company lists Gusu leading-enterprise and specialized and innovative enterprise honors, and states that its independently developed products filled domestic gaps and replaced imported products. Its products have been in stable batch production in FAB environments for more than five years, have served thousands of production lines worldwide, and are exported to more than 30 countries and regions including the United States, Japan, Singapore, Taiwan, Thailand, India and Germany. The company also describes its development focus as ozone-system solutions for semiconductor, LED and flat-panel-display fields, including semiconductor-grade high-purity ozone gas and ozone-water systems that it states have replaced imported brands.
Exhibits
The product range includes high-purity, high-concentration plate-type ozone generators, high-concentration ozone destructors, ODS systems for the semiconductor industry, ODS For Micro LED and high-concentration ozone-water equipment for semiconductor processes. Its semiconductor ODS is described as a domestic high-concentration, high-flow ozone system without nitrogen addition, with listed applications in TEOS-O3 Process CVD and ALD for High-K dielectric deposition. The high-concentration ozone destructor is listed for CVD, ALD, MOCVD, ashers and wet tools, while the high-purity, high-concentration plate-type ozone generator is specified as designed for semiconductor processes. The high-concentration ozone-water system provides Multi Chamber DIO3 supply and a dissolved ozone-water concentration range of 5-100ppm. The same ozone-water platform is specified to maintain constant ozone concentration and operating pressure at varying flow rates and to integrate a dissolved O3 water monitor. For semiconductor cleanliness and process control, the system is described as ultra clean for semiconductor processes and includes a closed-loop DIO3 concentration control system. A gas-liquid separation unit is integrated to provide bubble-free ozone water, and the equipment also includes a high-efficiency ozone contactor. The high-concentration ozone-water equipment is listed with SEMI-S2 and CE certification and with applications in cleaning, surface conditioning and etching. Beyond semiconductor processing, the company states that ozone generators are used in the production of health products such as food, pharmaceuticals and cosmetics, as well as fruit and vegetable preservation, livestock breeding, aquaculture, agricultural production and wastewater treatment. Across these offerings, the explicitly supported semiconductor capability combines semiconductor ozone-equipment R&D and manufacturing, high-purity and high-concentration ozone systems, certified ozone equipment and ozone-generation applications that include wastewater treatment.
Capabilities and products
- High-purity high-concentration plate-type ozone generators for semiconductors
- High-concentration high-flow nitrogen-free ozone systems for semiconductors
- Modular cold-plasma ozone systems for Micro LED
- High-concentration ozone destructors
- 5–100 ppm high-concentration ozonated water systems for semiconductors