At a glance
| Booth | P5300 |
| Country | TW |
| Website | www.superplustech.com.tw |
Company profile
SuperPlus TECH was established in December 2014, starting with a small number of employees and focusing on automation-equipment design, manufacturing and professional assembly subcontracting. The company is dedicated to the design, development, application and localized manufacturing of automated semiconductor wafer-transfer mechanisms. Its business scope also includes assembly subcontracting, automation-system integration, equipment manufacturing and distribution sales, and precision-parts manufacturing. A newly built production base in Zhudong covering more than 3,000 ping entered operation in March 2023. The Zhudong plant is planned with a cleanroom production area, research-and-development area, large automated warehouse and integrated production line. Those facilities are intended to support customer order demand and timely delivery while keeping R&D, clean production, storage and manufacturing flow within one production base. Through this combination, SuperPlus TECH's profile centers on semiconductor automation, wafer-transfer engineering, localized manufacturing, equipment integration and production support rather than on semiconductor device fabrication itself.
Exhibits
SuperPlus TECH's EFEM (Equipment Front End Module) is a semiconductor Loader/Unloader that provides automated front-end loading and unloading for different wafer sizes. The EFEM is designed to satisfy customer process-tool requirements and constraints and to support automation needs across semiconductor process equipment. The EFEM combines very high cleanliness, reliability and precision with high speed, space saving, low vibration and low noise. SuperPlus TECH also offers fully customized EFEM machine services so front-end automation can be configured around individual process-equipment requirements. Related wafer-handling products include the Auto Bare Wafer Stocker- AI Series, identified as a new wafer-storage device. The Mini Stocker- NTB (Near Tool Buffer) is another named related product in the wafer-transfer equipment portfolio. LoadPort wafer-carrier platforms are part of the related product range. Optical Character Recognition equipment is provided as a wafer code reader (OCR), adding wafer-identification capability to the company's automation portfolio. Argus is a wafer anti-scratch module, complementing transfer automation with a module focused on protecting wafers during handling. VMS-SE is an earthquake sensing and analysis system within the related product range. Partice-loT is a particle Internet-of-Things product within the related product range. A FOUP-form rail vibration inspection analyzer is also part of the related products. Together with EFEM, these products cover wafer storage, near-tool buffering, carrier interfaces, identification, scratch prevention, seismic sensing, particle monitoring and vibration inspection around semiconductor wafer-transfer automation.
Capabilities and products
- design and manufacturing of automated semiconductor wafer-transfer mechanisms
- customized EFEM wafer Loader/Unloader
- Bare Wafer Stocker
- Near Tool Buffer Mini Stocker
- LoadPort wafer-carrier platform
- wafer OCR code reader
- wafer anti-scratch module
- earthquake sensing and analysis system
- particle IoT monitoring
- FOUP rail vibration inspection and analysis