At a glance
| Booth | R7724 |
| Country | DE |
| Website | www.specs-group.com |
Company profile
SPECS Surface Nano Analysis GmbH operates within SPECSGROUP, which brings together the SPECS, Focus, Nanonis and Enviro brands in surface analytical instrumentation. SPECSGROUP supports these brands through a scientific network, worldwide sales and service infrastructure, and partner relationships so the individual brands can concentrate on their respective strengths. SPECS specializes in developing and producing standard and customized ultra-high-vacuum surface-analysis systems and in designing, producing, selling and maintaining instruments for surface science, materials science and nanotechnology. SPECS Surface Nano Analysis GmbH is headquartered in central Berlin, Germany, and its scientists and engineers work through SPECSGROUP within a global team of more than 200 employees. The company states that SPECS has created research instrumentation for 40 years, combining surface-analysis technology, components, compact systems and individually designed systems with global sales and maintenance capabilities.
Exhibits
SPECSGROUP supplies surface analytical instrumentation through SPECS, Focus, Nanonis and Enviro, supported by a scientific network and worldwide sales and service infrastructure. SPECS develops proven standard and customized UHV surface-analysis systems and maintains instruments for surface science, materials science and nanotechnology as part of this surface-analysis portfolio. Its surface-analysis offering includes advanced components, compact systems and individually designed systems produced by scientists and engineers working in the global SPECSGROUP organization. EnviroMETROS FAB provides hybrid semiconductor metrology with high stability, reliability and repeatability and is designed for high-sensitivity, high-throughput analysis of ultrathin films, 2D materials, multilayer systems and their surfaces. The EnviroMETROS platform combines a variable-information-depth photoelectron spectrometer with optical and other analytical techniques to perform chemical and dimensional analysis. EnviroMETROS FAB accommodates wafers up to 8-inch and 12-inch sizes, integrates with distribution systems and a wafer handler, and is described as supporting ISO conformity, clean-room use and SEMI-standard compatibility. For surface chemical analysis, the system uses XPS with adjustable information depth and X-ray energies of 1487 eV, 2984 eV and 5414 eV for nondestructive depth profiling by parallel-angle detection. Additional analysis modes include sputter depth profiling with monoatomic Ar ions or Ar clusters, ISS for identification of the top-most surface layer, combined UPS and IPES for electronic-structure analysis, IRRAS and Raman for surface optical metrology, and REELS for identifying energy-loss mechanisms. The platform is available as an ultra-high-vacuum version with a base pressure of 10^-10 mbar and as an environmental version with working pressures up to 50 mbar. The fully integrated system is designed for straightforward operation, maintenance access and optimized uptime in semiconductor-metrology workflows. Keystone M software provides user-level control, automated operation, analysis and data evaluation, while stored and documented parameters support reproducible analysis recipes and templates and facilitate system support. Together, the SPECSGROUP portfolio links UHV surface-science instrumentation with wafer-oriented hybrid semiconductor metrology for chemical, dimensional, electronic-structure, depth-profile and optical analysis.
Capabilities and products
- standard and custom UHV surface-analysis systems
- hybrid semiconductor metrology for ultrathin films and 2D materials
- 8/12-inch wafer surface metrology
- XPS nondestructive depth profiling
- Ar-ion/cluster sputter depth profiling
- ISS top-surface-layer identification
- UPS/IPES electronic-structure analysis
- IRRAS/Raman surface optical metrology
- 10^-10 mbar UHV surface analysis