At a glance
| Booth | S8237 |
| Country | DE |
| Website | www.smaract.com |
Company profile
SmarAct GmbH provides positioning technologies and contract manufacturing for engineering and series production. Its positioning capabilities include MCS2 Stick-Slip Piezo Drive Technology, MCS2 Scanner Piezo Drive Technology, MCS2 Electromagnetic Drive Technology, and closed-loop positioning with interferometric precision. SmarAct GmbH also provides high-resolution optical displacement measurements of piezo scanners and sub-pm resolution measurement of cantilever bending modes and displacements.
Exhibits
Piezo-driven goniometer stages are stackable and can be combined into multi-dimensional Euler positioning systems, while compact modular solutions support optical setups and experiments in optics. For precise positioning of samples, tools or equipment that requires more than one degree of freedom, hexapod-like systems offer higher stiffness than serial kinematics and enable high-dynamic applications. High-precision stages and systems are available for cryogenic temperatures, ultra high vacuum, high radiation and high magnetic fields. SmarAct GmbH uses in-house production to address OEM requirements and customized simple or complex positioning systems, including products compatible with cryogenic temperatures, ultra-high vacuum and magnetic fields. The positioning range covers a single positioner for a quantum-computing experimental setup, an OEM positioner in a laser, and an integrated motion system for semiconductor manufacturing equipment. Nanopositioning systems are used for trapped-ion quantum computing to provide the stability and accuracy needed for precise single-ion control, and SMARPOD provides mechanical stability and multi-axis control for low-loss fiber coupling in quantum-photonics research. Precision systems also support automated fiber-array assembly, alignment and microassembly of optical components, and OEM laser components for semiconductor and photonics applications. For photonic integrated circuits, SmarAct GmbH provides ultra-fast, high-precision fiber alignment at wafer level, and for semiconductor manufacturing it provides high-precision wafer positioning and wafer alignment using motion and metrology technologies. Positioning systems are applied to EUV lithography in harsh environments and to lithography mask correction at nm-level accuracy, while optical assemblies combine precision gripping and positioning for photonics applications. Cryogenic positioning systems support quantum applications under extreme conditions, and positioning and metrology solutions support optical characterization of micro displays and sensors. FlyScan-Analysis combines quick data collection and precise sample analysis with synchronized position tracking, and automated electrical probing solutions support precise semiconductor measurements. The PicoScale Vibrometer measures MEMS vibrations through silicon packaging with IR confocal imaging technology. Application examples also include SMARPOD for pick-and-place activities at the Institute of Photonics, University of Strathclyde UK, and a highly compact XYR-Stage for an automated laser ablation system for 3D-MICROMAC AG in Chemnitz, Germany. Featured products include SMARPOD, a hexapod-like positioning system with 6 DoF and a definable pivot point, and Nanoprober for electrical characterization of semiconductor devices. Stages with Exchangeable Drive Units are intended for high-availability applications in industry and science, while Micro-Grippers handle small and fragile objects. Cryogenic Piezo Stages and Systems provide linear and rotation stages for high-performance positioning under cryogenic conditions. The SmarAct Modular System combines compatible stages into complex and reconfigurable positioning setups, TRIPOD combines serial and parallel-kinematic approaches in a hexapod-like positioning system, and Motorized Opto-Mechanics provides a compact modular solution for optical setups and experiments.
Capabilities and products
- Stick-Slip piezo positioning technology
- scanner piezo positioning technology
- interferometric closed-loop precision positioning
- multi-dimensional piezo goniometer positioning
- 6-DoF hexapod-like positioning
- cryogenic piezo positioning stages
- high-precision semiconductor wafer positioning
- fiber alignment for photonic integrated circuits
- automated electrical probing for semiconductors
- MEMS vibration measurement through silicon packaging