At a glance
| Booth | J2157 |
| Country | TW |
| Website | shellbacksemi.com |
Company profile
SHELLBACK Semiconductor Technology and its Rite Track subsidiary use proprietary intellectual property and global services to provide new and remanufactured equipment, upgrades and services for Power Devices, Photonics & LED, MEMS & Sensors, Wireless & Analog, Memory/Storage and Advanced Packaging markets. Its wet-clean and etch portfolio includes MERCURY+, acquired in 2023, for low cost-of-ownership and high-throughput applications, together with TORRENT automated and semi-automated batch-spray systems based on proprietary SEMITOOL technology for processes up to 300mm. TORRENT supports advanced clean, etch and strip, while the HydrOzone process is used for batch ozone cleaning and is described as reducing chemical usage and addressing climate initiatives; the company states that HydrOzone has set a batch-ozone-cleaning standard since 1998. The portfolio also includes SEMITOOL SRD spin-rinse dryers and SEMITOOL STORM for advanced low-particle carrier cleaning. Through Rite Track, SHELLBACK Semiconductor Technology is the product-line owner of SVG 8X/9X coat-develop systems and provides custom solutions, repairs and upgrades for SVG and Track systems. Rite Track is also described as a product-line expert on refurbished TEL Mark, ACT and DNS 80 systems, extending the service and upgrade scope across coat-develop and scrub platforms.
Exhibits
MERCURY+ is a high-speed batch-spray cleaning product line associated with low cost of ownership, and SHELLBACK Semiconductor Technology owns the product line. TORRENT evolved from SEMITOOL Class 1 and Cintillio spray-batch tools and is offered as a SEMITOOL batch-spray platform. Wet-process solutions listed for the portfolio include Wet Etch with Spray Acid, Spray Solvent and HF Vapor; Resist Strip with Spray Solvent, Spray Acid and Spray Ozone using HydrOzone; and Clean with Spray Ozone using HydrOzone and Spray Acid. Automated systems are listed for 300mm and below, including TORRENT SP and MERCURY+ SP, while SEMITOOL SRD is listed for spin-rinse drying. Rite Track coat-and-develop systems include SVG 86 SQ (2”), SVG 86, SVG 88, SVG 90-S/SE, TEL Mark Vz, TEL Mark 7/8 and TEL ACT 8 /12. Upgrade categories include SVG, TEL Mark and TEL ACT, and scrub systems include SVG 86, SVG 88 and DNS 80 A/B. Rite Track is identified as the exclusive product-line owner of SVG 86, 88 and 90-S/SE systems, linking product ownership with repair, upgrade and custom-solution capabilities for installed track equipment. Together, MERCURY+, TORRENT, HydrOzone, SEMITOOL SRD, SEMITOOL STORM and Rite Track systems cover batch cleaning, wet etch, resist strip, ozone cleaning, spin-rinse drying, carrier cleaning, coat-develop, scrub, refurbishment and equipment-upgrade needs.
Capabilities and products
- wet cleaning and etch equipment
- automated/semi-automated batch-spray equipment
- HydrOzone batch ozone cleaning
- SEMITOOL STORM low-particle carrier cleaning
- SEMITOOL SRD spin-rinse drying
- SVG/Track coat-develop system repairs and upgrades
- high-speed batch-spray cleaning equipment