At a glance
| Booth | S8341 |
| Country | CN |
| Website | www.gnd-etech.com |
Company profile
Shanghai GND eTech Co., Ltd., Chinese name 上海集迦电子科技有限公司, is a Shanghai based sensor and measurement systems company for the pan-semiconductor industry. Its official site says it develops and manufactures high-end sensors and measurement systems, including fluorescent fiber-optic temperature sensors, in-situ wafer measurement sensors for vibration, level, position, humidity, temperature and other physical quantities, and other physical-quantity testing solutions. The site explains that in-situ wafer sensors are used for equipment commissioning and process verification in integrated-circuit equipment and chip manufacturing, covering lithography, dry etching, thin-film deposition, ion implantation, cleaning and packaging processes. A SEMICON China profile adds products such as CORELight fluorescent fiber-optic temperature sensors, EPD etch endpoint detection sensors, FIDIE wafer sensors, high-precision data-acquisition systems and customized high-precision probes.
Capabilities and products
- CORELight fluorescent fiber-optic temperature sensors
- EPD etch endpoint detection sensors
- FIDIE wafer sensors
- customized high-precision probes
- high-end sensors and measurement systems for the pan-semiconductor industry
- high-precision data-acquisition systems
- in-situ wafer measurement sensors for vibration, level, position, humidity and temperature
- single- and multi-channel digital transmitters for fiber-optic temperature probes