At a glance
| Booth | S8341 |
| Country | CN |
| Website | www.gnd-etech.com/products.asp?pone=130 |
Company profile
Shanghai GND eTech Co.,Ltd develops and manufactures high-end sensors and measurement systems for the pan-semiconductor industry, including fluorescent fiber-optic temperature sensors and In-situ wafer measurement sensors. Its sensor and measurement scope includes wafer-related measurement of vibration, level, position, humidity, temperature and other physical quantities, as well as other physical-quantity testing solutions for integrated-circuit equipment and chip manufacturing. In-situ wafer sensors are described for equipment commissioning and process verification across lithography, dry etching, thin-film deposition, ion implantation, cleaning and packaging processes. The company's fiber-optic temperature sensors are used in strong electromagnetic-interference environments including semiconductor, power, microwave-energy, petroleum and medical applications, where they provide accurate and reliable temperature measurement. Fiber-optic temperature probes are designed to work under strong electromagnetic and radio-frequency interference, chemical corrosion, high temperature and high microwave fields; the probes use temperature-resistant and other non-metallic materials, while compact digital transmitters are available in single-channel and multi-channel designs with selectable installation methods that commonly include DIN-rail mounting.
Exhibits
M9105 TC WAFER provides real-time temperature measurement for PVD, CVD, STRIP, DIFF and ALD processes. M9107 RTD WAFER (or MASK) is listed for wired temperature measurement on a hot plate or chuck in TRACK, PEB and Etch applications. WTS-ETCH is a wireless wafer temperature sensor for wireless hot-plate or chuck temperature measurement in ETCH, WET and CMP, while WTS-LITHO provides wireless chuck temperature measurement for Lithography and scanner applications. WLVS is a wireless wafer horizontal-vibration sensor for PVD, CVD and DIFF, and WMS is a wireless wafer multifunction sensor for the same listed process group. WCS is a wireless wafer chuck-positioning instrument for TRACK and ETCH, and WGS is a wireless wafer gap sensor for CVD and PVD. WFI--NEW is a wireless wafer focus-ring gap measurement instrument for ETCH, PVD, CVD and ALD, directly covering focus-ring gap measurement in several semiconductor processes. F86 is a fluorescent fiber-optic temperature sensor listed as an ETCH ESC temperature-measurement probe, while HR is a high-precision probe for TRACK HEATER applications. The product set also includes CORELight fluorescent fiber-optic temperature sensors, EPD etch endpoint detection sensors, FIDIE wafer sensors, high-precision data-acquisition systems and customized high-precision probes. The temperature probes and transmitters are interchangeable without requiring accuracy and measurement-range recalibration, supporting replacement within the stated sensing architecture. Across the portfolio, Shanghai GND eTech Co.,Ltd combines wired and wireless wafer temperature sensing, vibration and multifunction sensing, chuck positioning, wafer-gap and focus-ring-gap measurement, fiber-optic temperature sensing and high-precision probes for semiconductor equipment measurement and process verification.
Capabilities and products
- Real-time temperature measurement wafers for semiconductor processes
- Wired temperature measurement for hot plates and chucks
- Wireless wafer temperature sensors
- Wireless wafer horizontal-vibration sensors
- Wireless wafer chuck alignment instruments
- Wireless wafer gap sensors
- Wireless wafer focus-ring gap measurement instruments
- Fluorescent fiber-optic temperature sensors
- Wireless multifunction wafer sensors
- High-precision probes for TRACK HEATER