At a glance
| Booth | I2225 |
| Country | TW |
| Website | www.servomex.com |
Company profile
Servomex, Inc. provides reliable and accurate gas-analysis measurement solutions intended to help customers improve process efficiency, product quality, safety, and environmental compliance. With more than 70 years of expertise, Servomex, Inc. supports industrial gases, semiconductors, pharmaceuticals, power generation, energy, and combustion processes. Its portfolio includes precision gas analyzers, gas-analysis sensors, and gas-analysis system designs for critical measurement applications worldwide. The company combines gas-sensing technology with industry expertise so that measurement hardware is supported by application knowledge rather than supplied as an isolated instrument. A global service network supports analyzers and systems in the field and is part of the company’s approach to maintaining measurement performance and reliability across customer operations. Across its industries, Servomex, Inc. positions accurate measurement as a way to help customers optimize operating performance and achieve defined process and operational goals.
Exhibits
Servomex, Inc. engineering centres work with customers to build custom gas-analysis solutions designed around the precision and performance required by each process. Its Purity & Specialty team provides systems, application knowledge, and service support for industrial and medical gases, ultra-high-purity gases, semiconductors, and hundreds of other gas-analysis processes. Ultra-high-purity gases are essential to semiconductor manufacturing and to electronics production such as LED and LCD displays, and Servomex, Inc. provides a single-supplier solution for UHP measurements in these applications. Silicon-wafer manufacturing depends on ultra-pure gases to avoid contamination, so gas-purification procedures must be paired with accurate monitoring at very low concentration levels before UHP gases enter the manufacturing process. Even very small impurities can cause wafer defects, scrap, and waste, which is why quality-control measurements must cover multiple contaminants rather than monitoring only one impurity such as oxygen while missing trace moisture. For a comprehensive UHP system, the SERVOPRO DF500 and 700 NanoTrace ULTRA oxygen and moisture analyzers can be combined with the multi-gas SERVOPRO NanoChrome ULTRA, either integrated into existing systems or supplied as a turnkey Continuous Quality Control system for customer requirements. An international network of regional service personnel provides support for Servomex analyzers and systems so that UHP measurement installations can maintain performance and reliability after deployment. The UHP semiconductor range covers argon, carbon dioxide, carbon monoxide, hydrogen, methane, nitrogen, non-methane hydrocarbons, oxygen, and water vapour, with trace ppm, ultra-trace ppb, and ultra-trace ppt measurement ranges using Coulometric, Gas Chromatography, Laser Moisture, Plasma, and Tunable Diode Laser technologies. SERVOPRO DF-745 measures trace and ultra-trace moisture for UHP electronic-gas checks in LED and LCD manufacturing processes, while DF-745 SGMax is designed to measure diverse gas mixtures in specialty-gas blending applications. SERVOPRO DF-749 measures trace and ultra-trace moisture contamination in multiple background gases for quality checking of UHP gases used in LCD and LED manufacturing. SERVOPRO DF-750 is a trace and ultra-trace moisture analyzer optimized for UHP gases used in 300mm semiconductor fabs, and DF-750 ULTRA is optimized for quality monitoring in the same 300mm-fab environment. The compact SERVOPRO DF-760E is designed for quality control in UHP bulk gases through dual measurement of trace and ultra-trace moisture, while DF-760E ULTRA adds dual trace and ultra-trace measurement of moisture and oxygen. SERVOPRO NanoChrome uses gas-sensing and signal-processing methods for ultra-trace purity measurements, while NanoChrome ULTRA applies proven ultra-trace sensing to semiconductor-industry purity requirements. SERVOPRO NanoTrace DF-550E is an ultra-trace Coulometric oxygen analyzer optimized for quality measurements in UHP electronic gases, and DF-560E ULTRA is specified for UHP electronic-grade gas quality control with 45 parts per trillion oxygen detection. The SERVOPRO ULTRA Series is designed for demanding UHP gas analysis in semiconductor applications, using proven technologies that emphasize measurement performance, reliable operation, ease of use, and lower ownership cost than competing technologies. Its highly sensitive, non-depleting Coulometric sensor measures O₂ down to 45ppt without periodic sensor replacement and avoids the false low readings associated with fuel-cell sensors. For moisture, Tunable Diode Laser spectroscopy supports H₂O measurement down to 55ppt through a non-contact optical design intended for robust, simple, and low-maintenance operation. Plasma Emission Detector technology supports multiple-gas measurements down to 100-500ppt and is capable of stable, highly sensitive trace parts-per-billion measurement for UHP gas requirements. Across the ULTRA Series, non-depleting sensing technologies are used for accurate and reliable monitoring with high sensitivity, stable response, fast response to changing gas concentrations, and lower cost than technologies such as APIMS. Reduced maintenance requirements and extended calibration intervals support the ULTRA Series ownership model, while straightforward operation is intended to reduce training requirements and make operator errors less likely. DF-560E ULTRA has a 45 parts-per-trillion Lower Detection Limit for oxygen, automatically changes displayed units to ppt when measurement falls below 1 ppb, can monitor O₂ in multiple background gases, and logs data in multiple formats. DF-750 ULTRA is optimized for 300mm semiconductor fabs and measures moisture contamination in electronics-grade nitrogen, hydrogen, helium, argon, and oxygen, using Tunable Diode Laser sensing to achieve a 55 parts-per-trillion Lower Detection Limit. DF-760E ULTRA combines a non-depleting Coulometric sensor and Tunable Diode Laser technology in one compact unit to measure ultra-low H₂O and O₂ contamination in nitrogen, hydrogen, helium, oxygen, and argon background blends, with H₂O in O₂ only. NanoChrome ULTRA uses Plasma Emission Detector sensing with ProPeak software to monitor argon, methane, carbon monoxide, carbon dioxide, hydrogen, nitrogen, and non-methane hydrocarbons across common background gases. The broader SERVOPRO safe-area range uses sensing technologies including Paramagnetic, Zirconia, Flame Ionization Detection, Plasma, and Gas Chromatography for industrial-gas and semiconductor measurements. SERVOPRO analyzers can be configured for specific requirements such as syngas, hydrocarbons, or trace gas mixtures, or for multi-gas monitoring in continuous-emissions-monitoring systems and air-separation-unit plants. The safe-area range spans percentage measurements through trace, ultra-trace ppb, and ultra-trace ppt levels and is designed to cover multiple gases and measurement ranges for industrial-gas and semiconductor applications. SERVOPRO analyzers are available for benchtop use or 19-inch rack mounting, with onboard software for direct operation and analog and digital communications options for remote operation and system integration. Additional safe-area models include the 4900 Multigas for multi-gas CEMS measurement, Chroma optimized to specific background gases, FID for trace analysis in ASU safety and quality control, MonoExact DF150E and DF310E oxygen analyzers, and MultiExact 4100 for up to four simultaneous gas-stream measurements. The SERVOPRO Plasma provides stable gas measurement with high sensitivity in the 0-1ppm range, while SERVOPRO PureGas is a getter-based purification unit for carrier gases used in Gas Chromatography and other analytical applications.
Capabilities and products
- custom gas analysis solutions
- UHP purity monitoring for all impurities
- turnkey UHP Continuous Quality Control systems
- integration of gas analysis into existing systems
- 45ppt ultra-trace oxygen measurement for UHP gases
- 55ppt ultra-trace moisture measurement for UHP gases
- dual moisture and oxygen analysis for UHP gases
- 100-500ppt multi-gas plasma measurement
- specialty gas mixture measurement
- multi-gas analysis for CEMS
- remote communications integration for gas analyzers
- carrier-gas purification for Gas Chromatography (GC)
- precision gas analyzers and sensors