At a glance
| Booth | K2386 |
| Country | TW |
| Website | www.semilab.com |
Company profile
Semilab Taiwan Co. Ltd. is part of the Semilab group, which designs, produces, and sells metrology equipment used to characterize semiconductor and photovoltaic materials. The group’s equipment is also used to monitor manufacturing processes for semiconductor devices, flat panel displays, and solar cells, and to support research and development in those same areas. Semilab provides a variety of measurement techniques, with most of those techniques described as non-contact and non-destructive. Its technologies can be flexibly integrated into platforms ranging from simple handheld devices and table-top systems with high-resolution mapping capability to fully automated stand-alone production-control tools for mid-range and high-level fablines. Semilab is based in Budapest, Hungary, and maintains research-and-development and product centers in the United States at Tampa, Florida and Billerica, Massachusetts, as well as in Germany and Denmark. The group has direct sales and service offices in major markets including the United States, Japan, Korea, China, Taiwan, and Singapore, supported by a network of representatives around the world.
Exhibits
Semilab’s semiconductor measurement portfolio includes characterization of 3D structures and compound materials, giving the product range tools for evaluating advanced structures as well as non-silicon and compound-material systems. Contamination analysis and contamination monitoring are separate listed application areas, complemented by defect inspection for identifying manufacturing-related material or device issues. For dielectric structures, the portfolio includes dielectric porosity measurement and electrical characterization of dielectrics and interfaces, covering both physical and electrical aspects of dielectric evaluation. Epitaxial process control is represented by epi resistivity measurement and epi thickness measurement, while ion implant monitoring and metallization control address additional process-control steps. Nano surface characterization, thin-film optical characterization, and thin-film thickness measurement extend the measurement range to surfaces and thin films where optical and nanoscale information is required. Across the semiconductor flow, Semilab offers solutions for different measurement and application needs from starting material through back-end processing rather than limiting the equipment to a single process stage. Available equipment includes testing of bulk contaminants in Silicon at the highest possible sensitivity, epi resistivity measurement, and control of the optical and electrical properties of dielectrics on product wafers. These applications can be paired with the group’s platform range from handheld and table-top measurement tools through high-resolution mapping systems and fully automated stand-alone production-control tools.
Capabilities and products
- metrology equipment for semiconductor and photovoltaic materials
- 3D structure characterization
- compound material characterization
- contamination analysis
- contamination monitoring
- defect inspection
- dielectric porosity measurement
- electrical characterization of dielectrics and interfaces
- epi resistivity measurement
- epi thickness measurement
- ion implant monitoring
- metallization control
- nano surface characterization
- thin-film optical characterization
- thin-film thickness measurement
- high-sensitivity bulk contaminant testing in silicon