At a glance
| Booth | K2386 |
| Country | TW |
| Product categories | Acoustic Spectroscopy; Electron Spectroscopy for Chemical Analysis (ESCA); Ultrasonic; Acoustical Mi · CV (capacitance-to-voltage) Probe systems · Defect; Particle; Bump; Contamination Detection, Review or Inspection · Film Thickness; Thickness; Uniformity Measurement; Ellipsometer · Line Width; Critical Dimension (CD) Measurement · Microscopes: Atomic Force Microscopes (AFM) · Microscopes: Confocal Scanning Microscope; 3-D Video Microscopes · Resistivity Measurement; 4 point probe; Sheet resistance · Spectrometers; Fourier Transform Infrared (FTIR); Attenuated Total Reflectance FTIR (ATR-FTIR); Auge · Stress; Refractive Index; Reflectivity & Conductivity Measurement · Wafer; Substrate Metrology; Topology; Nanotopography; Flatness Measurement; Crystalline Orientation |
| Website | www.semilab.com |
Company profile
Semilab group design, produce and sell metrology equipment for the characterization of semiconductor and photovoltaic materials, for monitoring the manufacturing process of semiconductor devices, flat panel displays and solar cells, and also for R&D purposes in these areas. We offer a variety of measurement techniques; most of them are non-contact and non-destructive. Many of our technologies can be flexibly integrated into different platforms, ranging from simple handheld devices and table-top systems with high resolution mapping capability to fully automated stand-alone production control tools for mid-range and high-level fablines. Semilab is based in Budapest, Hungary, and has R&D and product centers in the USA (Tampa, FL and Billerica, MA), in Germany and in Denmark. It has direct sales and service offices in all major markets, including the USA, Japan, Korea, China, Taiwan, Singapore, and a network of representatives all over the world.
Capabilities and products
- CV capacitance-to-voltage probe systems
- ESCA electron spectroscopy for chemical analysis
- acoustic and ultrasonic spectroscopy metrology
- fully automated stand-alone production control tools
- high-resolution mapping table-top systems
- metrology equipment for photovoltaic material characterization
- metrology equipment for semiconductor material characterization
- non-contact measurement techniques
- non-destructive measurement techniques
- semiconductor device manufacturing process monitoring
Related product topics
- Acoustic Scanning Microscopy
- Scanning Acoustic Microscopy
- Semiconductor Metrology Systems
- Non-Contact & Non-Destructive Metrology
- Semiconductor Material Characterization
- Process-Control Metrology Solutions
- Semiconductor Metrology and Inspection Equipment
- Semiconductor Surface Analysis
- CV Capacitance-Voltage Probe Systems
- Process Monitoring Systems