At a glance
| Booth | M0556 |
| Country | KR |
| Website | www.esealink.com |
Company profile
Sealink Corp. specializes in manufacturing and designing rotary feedthroughs, linear feedthroughs and rotary unions for equipment that requires sealed transfer across moving interfaces. Its feedthroughs use Sealink's own sealing technology and are designed to operate under both high-pressure and high-vacuum conditions. The sealing method can handle different media including gas and liquid. Sealink states that its sealing technology is not based on ferrofluids or magnetics, distinguishing it from magnetic ferrofluid seals. The company compares magnetic seals as vacuum-only solutions for gas with its own seals, which are intended for both vacuum and pressure and for gas, liquid and other media. Its semiconductor-industry application list includes CVD, MOCVD, LPCVD, PECVD, PCD, ALD and CMP equipment. The same application range also includes OLED, LCD, FPD, wafer handling and vacuum-deposition equipment. Additional semiconductor applications named by Sealink include ion implanters, etchers, ashers, edge grinders, scrubbers, RTP and sputter systems. The company further lists lamp equipment, autoclaves and wafer robots among the environments where its sealing products can be applied. Sealink positions its design and manufacturing work around adapting feedthrough and union configurations to pressure, vacuum, speed, temperature, stroke, shaft and port requirements encountered in semiconductor equipment.
Exhibits
For linear motion, Sealink Corp. customizes standard linear feedthroughs according to pressure, vacuum, stroke, speed and temperature requirements. The company states that this customization allows existing feedthroughs to be replaced with Sealink products without adding extra equipment. For rotary motion, Sealink offers standard rotary feedthroughs with either solid shafts or hollow shafts. Customized rotary feedthroughs can be optimized for equipment operating conditions including pressure, vacuum, speed and temperature. Its rotary unions are available with a single port or multiple ports and can transfer different materials simultaneously. The media handled by the rotary unions can include both liquid and gaseous materials. Rotary-union configurations can be optimized according to pressure, vacuum, speed, number of ports and temperature. Sealink's Diffusion Furnace R Axis applies the principle of Electrohydrodynamic Lubrication, or EHL, and operates with a non-ferrofluid method. The company identifies this R Axis as suitable for diffusion-furnace equipment used in semiconductor processes. Its High Pressure Hydrogen Annealing Device for R Axis also applies the EHL principle and is intended for high-pressure hydrogen annealing processes in semiconductor manufacturing. Across the lineup, Sealink combines non-ferrofluid sealing with custom linear feedthroughs, solid- or hollow-shaft rotary feedthroughs, single- or multi-port rotary unions, and EHL-based R-axis products for semiconductor equipment.
Capabilities and products
- custom linear vacuum feedthroughs
- custom rotary vacuum feedthroughs
- rotary unions for liquid and gas transfer
- non-ferrofluid, non-magnetic rotary sealing
- non-ferrofluid R-axis for diffusion furnaces
- R-axis device for high-pressure hydrogen annealing