At a glance
| Booth | N0876 |
| Country | TW |
| Website | www.sanwa-eng.com.tw |
Company profile
Sanwa Engineering Corp. is a Taiwan company focused on automation solutions for advanced clean-room processes, including semiconductor and FPD applications, and integrates specification formulation, motion control, mechatronics integration and software development. It designs and manufactures Robot, EFEM and Sorter automation for LCD and IC clean rooms and provides LCD and IC Robot overhaul services. Its clean-room automation offering includes semiconductor and FPD solutions, agent technology and development cases for advanced processes.
Exhibits
The semiconductor product range includes ROBOT, ALIGNER, EFEM, SORTER, STOCKER wafer and cassette handling systems, SMIF OPENER, ROBOTIC PARTS and LOAD PORT products. The SAS Series is a 3-axis cylindrical-coordinate articulated single-arm clean robot with a sidewise shoulder-joint design that reduces rotating radius and extends pick-and-place distance, closed-loop AC servo drives with high-resolution absolute encoders on all axes, a high-strength and high-rigidity arm for larger loads such as a flipping end-effector, and a high-performance controller for arc motion trajectories. The SAD Series is a 4-axis cylindrical-coordinate articulated dual-arm clean robot with the same shoulder-joint and closed-loop AC servo architecture, supports wafer exchange and synchronized dual-arm pick-and-place actions, and also provides double-flip operation with smooth high-speed acceleration and deceleration, an advanced AC servo actuator, ±180° rotation and optional wafer mapping. The SSS Series is a 3-axis cylindrical-coordinate heavy-load single-arm clean robot with closed-loop AC servo drives and high-resolution absolute encoders, dual-axis interpolation for linear-trajectory accuracy, a high-rigidity structure for long-reach and high-load handling, rotation beyond 360° without a dead angle, and customizable waterproof performance. The SSD Series is a 4-axis cylindrical-coordinate heavy-load dual-arm clean robot with closed-loop AC servo drives, high-resolution absolute encoders, dual-axis interpolation, a high-rigidity structure for long-reach and high-load handling, rotation beyond 360° without a dead angle, and customizable waterproof performance. The SIS Series is a 3-axis cylindrical-coordinate articulated single-arm clean robot with an efficient stepping-motor drive system, incremental encoders on each axis and a lightweight compact design, while the SID Series is a 4-axis cylindrical-coordinate articulated dual-arm clean robot using an efficient stepping-motor drive system and a lightweight compact design. The SK Series is a 5-axis horizontal multi-joint single-arm clean robot with dual end-effectors, closed-loop AC servo drives and high-resolution absolute encoders on all axes, high-transmission-rigidity direct-output joints for precision and stability at high speed, and 300 mm wafer handling compliant with SEMI-standard applications. The SV Series is designed for vacuum chambers with high-rigidity joints, extremely high-speed and quiet operation, and safe, stable handling, while the ST Series is a 5-axis cylindrical-coordinate articulated clean robot with a link-type dual arm, minimized rotation radius and handling size up to W730 x D920 mm. The FR Series is a 3-axis orthogonal-coordinate articulated single-arm clean robot for FOUP handling, with a thin Z-axis body to reduce equipment footprint, support for 300 mm wafer FOUP transport, a FOUP-locking clamp and rapid, precise pick-and-place movement. The FV Series is a 3-axis orthogonal-coordinate vertical-joint single-arm clean robot for FOUP handling, with a thin Z-axis body, bottom-side FOUP clamping, a patented vertical extension arm that reduces vertical gaps between FOUP storage slots, good static load rigidity, and a high-stroke reach covering 3 columns of FOUP arrays for high-speed transfer of vertically arranged FOUPs. The VIP Series is a 5-axis cylindrical-coordinate long-travel dual-linear-arm clean robot using combined AC servo and stepping-motor drives with high-resolution absolute encoders and a patented compact variable-pitch mechanism with continuous control across 4.5~15mm spacing. VIP Series functions include selectable single-wafer and five-wafer handling, connection to 200 mm STOCKER and vertical-furnace processes for cassettes with different pitches, simultaneous single- and double-arm transfer, a linear-motion structure for smooth movement, and use in high-cleanliness, compact-space applications. The SNE Series is a wall-mounted long-stroke clean robot driven by AC servo and linear motors with high-resolution absolute encoders; it can pick up to five wafers simultaneously for higher transfer throughput and flexible motion configurations, and combines a small rotation radius with a long wafer-pick stroke for space utilization. The SNP Series is a four-arm high-vertical-stroke clean robot using combined AC servo and stepping-motor drives with high-resolution absolute encoders, and its arms can move independently or in synchronized transfer motions. The SSS201 Series batch-wafer-transfer robot handles 25 wafers with high rigidity and heavy payload, uses unique clamping devices and optimized speed for stable transfer, separates dirty and clean batches through separate touch areas for front-end and back-end wafers, and is designed for high-cleanliness applications. The SSD wet-arms robot uses an ultra-high-air-tight structure with a sealed telescopic Z-axis, supports flexible rotating-shaft configuration with an absolute encoder, is intended for high-waterproof applications, and offers an optional wall-mounted walking shaft. Across closed-loop models, all-axis AC servo drives can be paired with high-resolution absolute encoders, while high-transmission-rigidity direct-output joints support precision and stability during high-speed operation; hybrid AC-servo and stepping-motor control is also used with high-resolution absolute encoders in variable-pitch and multi-arm systems.
Capabilities and products
- cleanroom robots for LCD/IC
- EFEM automation systems
- wafer sorter automation systems
- wafer/cassette stocker handling systems
- SMIF opener
- load port
- LCD/IC robot overhaul service
- wafer aligner
- cleanroom robot parts
- single-/dual-arm clean robots