At a glance
| Booth | H0001 |
| Product categories | Heating; Annealing; Curing Equipment - Furnaces; Conveyors; Ovens; Test Chambers; Heat Treating · Vacuum drying & out gassing Systems · Instruments; Bench Top Test · Thermal Sensing, Measurement, Analysis · Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD · Etching; Stripping; Ashing - Dry and Wet Equipment · Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment · Electronic Hardware; Fixtures and Supplies · Raw Material & Custom components; Metal · Sensors · Computer ; Control ; Communication ; Data Acquisition Systems · Plasma Sources; Controls; Monitoring; Diagnosis · Power Supplies; RF Generators; Converters; Electrical Conditioning · Process Monitoring systems · Equipment; Hardware; Product Design, Integration and Manufacturing · Product Development; Software Design; Product Lifecycle Management · Test Services or Consulting |
| Website | s-team.sk |
Company profile
S-TEAM, founded in 1990 by scientists from the Slovak University of Technology, develops high-power microwave systems for plasma generation in semiconductor processes such as CVD and plasma etching. Other industrial application includes heating, drying, curing and vulcanization. Our HOMER autotuners enable fast, automatic impedance matching under dynamic plasma loads at ISM bands (900 MHz, 2.45 GHz, 5.8 GHz), supporting continuous and pulsed operation with peak powers up to 100 kW. Systems are available for WR975, WR340, WR430, WR284, and WR159 waveguides. We offer HOMER Analyzers, bidirectional power meters, directional coupler detectors, and custom microwave components. Integration via analog/digital I/O and Ethernet is supported. All R&D, manufacturing and calibrations are in-house, with proven reliability in harsh plasma environments. We serve global OEMs, fabs, and R&D labs across the EU, US, Japan, Korea, China, Taiwan and beyond.
Capabilities and products
- HOMER Analyzers
- HOMER autotuners for automatic impedance matching under dynamic plasma loads
- analog, digital I/O and Ethernet integration
- bidirectional power meters
- continuous and pulsed microwave plasma operation up to 100 kW peak power
- custom microwave components
- directional coupler detectors
- high-power microwave plasma generation systems for CVD and plasma etching