At a glance
| Booth | N0267 |
| Country | TW |
| Website | rotarex.com |
Company profile
Rotarex Taiwan has been established in Taipei, Taiwan since 2018 as part of the ROTAREX group, with the Taiwan office responsible for sales and technical support across Taiwan. The Taiwan office works closely with Rotarex S.A. in Luxembourg, Rotarex Fareast serving Singapore, ASEAN, Australia and New Zealand, Rotarex Star in China, Rotarex Korea and Rotarex Japan. Rotarex has a long history of developing gas-control products and systems and links its product development to customer challenges and new ways of working. Its rapid-response R&D infrastructure and collaboration with university partners are used for applied innovations such as an integrated valve combining a cylinder valve, gas pressure regulator, gauge, safety valve and other functions. The company also identifies products developed in response to market needs, including a mechatronic pressure regulator and a digital medical pressure-regulating valve.
Exhibits
Rotarex supplies cylinder valves, pressure regulators, gas supply systems and components for medical-gas applications, together with equipment for HP, UHP and industrial gas systems. Its stated range includes supply and switchover boards, pressure regulators, line valves, fittings and connectors, a complete range of Ultra High Purity gas solutions, industrial-gas cylinder valves, Release Pressure Valves (RPVs), valves with integrated pressure regulators (VIPRs), and fire-protection systems for total-flooding and local applications. For electronics manufacturing, Rotarex addresses semiconductors, photovoltaic cells, OLED displays and advanced microelectronics, where the company frames gas contamination as a direct process risk and provides ultra-high-purity equipment from cylinder valves and line valves to pressure regulators, fittings and precursor canisters. Its UHP valves use a springless, threadless design intended to eliminate internal mechanical contact as the primary origin of particle generation, and UHP valves are assembled, tested and packaged in an ISO 4 cleanroom. Every UHP unit is described as undergoing 100% helium leak testing before shipment, while electropolished internal surfaces comply with SEMI F19 Grades and leak integrity is rated up to 10⁻¹¹ mbar.l/s for aggressive process-gas applications. The electronics gas applications include corrosive, toxic and high-value gases such as fluorine compounds, halides, hydrides and metalorganic precursors, with examples including arsine, silane and hydrogen fluoride. Rotarex lists UHP gas valves for electronics, chemicals and other applications across purity levels from 4.0 to 9.0 and above, with low- and high-pressure configurations, tied-diaphragm or packed-seal technologies, and connections for standards including DIN, CG, JIS, BS, AFNOR, UNI, NEN and NBR. UHP line valves are described with springless and threadless construction, minimized dead space, working pressure up to 240 bar, supported temperatures from -20 to 150 Celsius degrees, ISO 4 cleanroom assembly, testing and packaging, electropolished surfaces per SEMI F19 Grades and 100% helium leak testing. UHP line pressure regulators are specified for high outlet-pressure stability, an expanded flow-rate range, pressure handling up to 240 bar and supported temperatures from -20 to 65 Celsius degrees. Pressure-regulator models include RX3000 single-stage diaphragm with Cv 0.09 or 0.15 and inlet 21/240 bar, RX3100 sub-atmospheric with Cv 0.09 and inlet 21 bar, and RX3200 single-stage tied-diaphragm with Cv 0.09 or 0.15 and inlet 21/240 bar. The larger regulator range includes RX4000 single-stage diaphragm and RX4200 single-stage tied-diaphragm, each offered with Cv 0.15, 0.25, 0.5, 0.9 and 1.1 and inlet ratings of 21/117/207/240 bar, plus the RX4100 sub-atmospheric regulator with Cv 0.5 and inlet 21 bar. Springless diaphragm line-valve models include RX04 with flow capacity 0.2, RX08 with 0.5, M12 with 1.75 and M20 with 3.5, all identified as HP and UHP line valves. Tied-diaphragm line-valve models include D604 manual and D654 oleo-pneumatic valves with 4mm orifices, D688 pneumatic with a 4mm orifice and soft knife-edge seat, and D639S manual and D689S oleo-pneumatic models with 6mm orifices. Bellows and check-valve families cover K300, HP2000, K900, HP9000, HP3000, SUPRA and CAR(S), with stated temperature ranges covering ambient-temperature and cryogenic service and reaching as low as -270°C and as high as +250°C depending on product family. Rotarex's UHP gas cylinder valves include D304, D385S, D386S, D354, D340S, D306, D356, D339S, D389S, D349, D337, D387 and D342, with combinations of high or low pressure, manual, pneumatic or oleo-pneumatic actuation, soft-seat or metal-to-metal sealing and orifice sizes from 3.5mm to 8mm. D386S is identified as a tied-diaphragm cylinder valve for fluorine mixtures with a pneumatic actuator, while D340S, D349 and D342 are dual-port UHP-valve configurations with 4mm, 6mm and 8mm soft-seat orifices respectively. The UHP connector range includes 40 SERIES standard connectors with nipple, nut and gasket; 45 SERIES complete connectors adding a blank plug; 50 SERIES blank plugs; 60 SERIES outlet adaptors; CGA/DISS cylinder outlet seal caps; and 30 SERIES cylinder-valve gaskets. For precursor handling, stainless-steel canister models include RX507L at 6L for sampling, RX171L at 19L for product use and RX200B covering 200L to 1000L with storage configurations up to 3000L. The canister, precursor and bubbler range is intended for inert storage and controlled delivery of metalorganic precursors and dopants used in CVD and ALD, with the stated range spanning sampling, product and large-volume storage configurations. Vacuum-generator models include RXVGB, a block type rated at 60torr vacuum without a check valve, and RXVGM, a module type rated at 100torr vacuum with a check valve for integration into semiconductor gas systems. Rotarex positions its complete UHP chain from cylinder to point of use under one quality reference, traceability system and compliance framework, covering cylinder valves, line valves, pressure regulators, fittings and precursor canisters as integrated parts of one gas-control system. For pressure regulation in CVD, ALD and etch applications, the company links stable outlet pressure to process repeatability and specifies UHP regulators with working pressure up to 240 bar, supported temperatures from -20°C to 65°C and electropolished internal surfaces to SEMI F19 UHP Grade. For UHP line valves, diaphragm and tied-diaphragm designs remove internal mechanical contact and minimize dead space, bellows versions provide hermetic stem isolation for aggressive and cryogenic chemistries, leak integrity is rated up to 10⁻¹¹ mbar.l/s and operating capability reaches 240 bar and -20°C to 150°C. For UHP fittings, metal-to-metal face-seal technology avoids elastomer seals, internal surfaces are electropolished to SEMI F19 UHP Grade, and the range covers cylinder connectors, face-seal fittings, weld fittings and high-flow fittings for standard semiconductor UHP tubing and connection formats. Ultra-high-purity cylinder valves are offered in manual and pneumatic versions across purity levels from 4.0 to 9.0 and above, with tied-diaphragm sealing rated up to 10⁻¹¹ mbar.l/s and metal-to-metal sealing available for highly oxidizing gases. The premium UHP gas-system range is designed to transport, regulate and deliver gases with contamination levels measured in parts per billion and combines specialized materials, purification technology and engineering intended to prevent particles, moisture intrusion and cross-contamination from the initial supply point to the point of use. Rotarex lists UHP system applications in semiconductor fabs, pharmaceutical cleanrooms, aerospace research, analytical instruments, industrial processes and solar-panel manufacturing, with semiconductor uses including etching, doping, deposition and surface fabrication. For these UHP systems, the company lists 100% helium leak testing, purity-specific packaging, ISO 4 cleanroom manufacturing, support for corrosive, toxic and specialty gases, purity levels from 6.0 to 9.0 and above, and tied-diaphragm, diaphragm, packed-seal, bellows-seal and O-ring-seal technologies. Ready-to-install and customizable UHP systems are identified for gas cabinets, VMBs or valve manifold boxes, process tools and gas-delivery systems, using pressure regulators, line valves, fittings, cylinder connectors, canisters and other UHP components. Threadless and springless UHP pressure regulators are described as single-stage diaphragm regulators for high and ultra-high-purity gases, with a sub-atmospheric option, optimized supply-pressure effect, flow stability, life duration according to CGA E4, electropolished surface roughness per SEMI F19 UHP Grade and a SEMI F20 material option. The high-purity line-valve range also includes D615 manual and D655 pneumatic bundle valves rated up to 500 bar, together with D605 for hydrogen, methane and acetylene applications using an O-ring and a 12mm orifice. High-purity cylinder-valve options include D551 Ducal and D552 Flowcal stainless-steel VIPRs for calibration applications, with D551 using an adjustable pressure regulator and D552 adding an integrated flow selector. Additional high-purity cylinder-valve models include D200, D250, D265, D283, D282, D203, D285, D100, D131, D160S, D156S, D195S, D154S, D167S, D158, D183, D405 and D488, spanning diaphragm, packed-seal and O-ring designs, RPVs, drum and lecture-bottle valves, manual and pneumatic actuation, and applications including hydrogen, methane and acetylene. Across the electronics and UHP ranges, Rotarex emphasizes complete traceability, material certification and documentation for qualification and compliance audits, along with cleanroom assembly, individual testing and international connection standards across the gas circuit.
Capabilities and products
- semiconductor UHP gas supply systems
- Ultra-high purity gas cylinder valves
- UHP gas line valves
- UHP gas pressure regulators
- UHP gas fittings and connections
- CVD/ALD precursor canisters and bubblers
- UHP vacuum generators for semiconductor gas systems
- semiconductor VMB valve manifold boxes
- UHP metal-to-metal face-seal fittings