At a glance
| Booth | R8112 |
| Country | TW |
Company profile
Renishaw (Taiwan) Inc. is the Taiwan entity of Renishaw, supplying precision position-feedback and measurement products for semiconductor wafer-stage and inspection applications. Its RLE interferometric laser encoders (RLE10 and RLE20) provide nanometre-level linear position measurement with low cyclic error for wafer inspection, and its RMAP periscope enables six-degrees-of-freedom measurement in XY wafer-stage applications. Its VIONiC incremental optical encoder offers interpolation down to 2.5-nanometre resolution for ultra-fine motion control in wire bonding, die placement, wafer inspection and alignment, alongside the QUANTiC, TONiC, ATOM and ATOM DX optical-encoder families used in precision stages. For semiconductor material and failure analysis it offers Raman spectroscopy systems with the MS30 high-speed optically encoded sample stage. The company is positioned as a supplier of optical and laser encoders, interferometric position feedback and Raman spectroscopy for semiconductor stages, inspection and material analysis.
Capabilities and products
- QUANTiC, TONiC, ATOM and ATOM DX optical encoders for precision stages
- RLE10 and RLE20 interferometric laser encoders
- RMAP six-degrees-of-freedom measurement for XY wafer stages
- Raman spectroscopy systems with MS30 encoded sample stage
- VIONiC incremental optical encoder with 2.5-nanometre interpolation
- nanometre-level linear position measurement for wafer inspection