At a glance
| Booth | N1067 |
| Country | DE |
| Website | www.rena.com |
Company profile
RENA Technologies GmbH develops and manufactures wet-chemical processing equipment, including flexible and high-throughput systems used across semiconductor, MedTech, glass and renewable-energy applications. RENA equipment treats semiconductor wafer surfaces by etching, plating, cleaning and drying with standardized machines and guaranteed processes or with entirely customized equipment. The company reports 3 manufacturing sites, 2 innovation hubs and more than 3,350 systems installed worldwide, and its organization includes more than 130 engineers, 150 global service experts and 20 service locations. RENA was founded in 1993 and lists 900 employees, while its worldwide organization combines manufacturing, innovation and service resources around wet-processing equipment and process development. From its headquarters in the Black Forest, RENA markets products globally with the Made in Germany quality seal and conducts product research and development at its in-house laboratory in Freiburg im Breisgau. Nine company sites and numerous customer service centers around the world are used to provide customer service and maintenance for purchased systems even when the customer's production site is far from a RENA location. RENA also develops modular machinery and control software so individual process sequences can be mapped to customer requirements, and it links this engineering approach with traceability and consistent product quality. In green-energy applications, the company describes process reliability and wafer quality as outcomes of controlled wet-chemical processing, with optimized chains spanning cleaning, edge isolation, one- or two-sided etching and drying. In MedTech, RENA links traceability and fully automated process control with reproducible high-precision and high-throughput production under stated quality and cleanliness requirements. For customized production machinery, RENA identifies low space requirements, access to customer service and flexible control software as operating characteristics, while its specialist team applies machinery-building and control-software experience to individual sequences. The company also lists qualification and continuing-professional-development programs for employees and describes cross-sector and cross-country teamwork across sales, development, production, customer service and administration. Recent company information references Revolution+ as a compact system concept combining flexibility, process reliability and efficient wet processing, alongside equipment transport preparation and sustainability activities tied to technology development and production operations.
Exhibits
RENA Technologies GmbH offers manual and fully automatic wet benches for small- and large-scale semiconductor-element production, integrating wet-chemical etching, cleaning and drying for front-end-of-line (FEOL) and back-end-of-line (BEOL) applications. The semiconductor platforms can be adapted to production processes and can combine deposit removal with piranha solutions, RCA cleaning, hot phos etching and Marangoni drying in a production sequence, with the same flexibility available for mass production, research machinery and small-scale production. For solar manufacturing, RENA provides wet-chemical surface-treatment machinery and process chains from cleaning and edge isolation through one- or two-sided etching and drying, while the monoTEX® additive supports texturing of diamond-wire- and slurry-sawed wafers. Inline and batch solutions are available for global production and can be adjusted to specific requirements. For medical devices and components, RENA supplies highly automated solutions for complex cleaning and wet-chemical surface treatment, including equipment for producing electropolished stents or optical substrates with traceability and fully automated process control. Its medical-production machinery and software can be supplied as standard or individual solutions and are developed in compliance with GMP and GAMP 5 guidelines. For high-end glass applications, RENA provides advanced cleaning and etching that combines laser and wet-processing technologies, drawing on experience in MedTech, pharma, semiconductor and photovoltaic industries. Customized wet-chemical production machinery is used for shaping, texturing and cleaning different substrates, with a modular machine structure, flexible control software and engineering for individual process sequences. The service portfolio listed with the equipment includes spare parts, upgrades, Service Level Agreements and training, complementing the worldwide service and maintenance network. RENA states that it continuously develops efficient processes to achieve surface quality for customers, treating process optimization as an ongoing part of equipment engineering rather than only a machine-delivery step. The company describes its wet-processing mission through the idea of state-of-the-art solutions and links its corporate culture with creativity, imagination, vision, innovation, performance and continuous improvement of quality and services.
Capabilities and products
- manual and fully automatic semiconductor wet benches
- FEOL / BEOL wet etching, cleaning, and drying
- deposit removal with piranha solutions
- RCA cleaning
- hot phosphoric-acid etching
- Marangoni drying
- solar-wafer edge isolation and one-/two-sided etching
- monoTEX® precision wafer texturing
- wet cleaning and surface-treatment equipment for medical devices
- electropolished-stent production equipment
- wet-processing equipment for optical substrates
- glass laser-plus-wet cleaning and etching
- substrate shaping, texturing, and cleaning equipment