At a glance
| Booth | I2822 |
| Country | TW |
| Website | www.pi.ws |
Company profile
The PI Group offers a broad and deep portfolio of precision motion technologies and identifies continuous growth through the development of new products and technologies as one of its main characteristics. Physik Instrumente (PI) was founded more than four decades ago and is described as a global market and technology leader in precision positioning technology with accuracies into the sub-nanometer range. PI Ceramic was founded in Lederhose in 1992 as a development and manufacturing site for piezoelectric transducers, currently employs 200 people, and is described as one of the world leaders in piezo actuators and sensors. PI miCos was founded in 1990, joined the PI Group in 2011, currently has more than 60 employees, and develops, produces and markets systems and components for high-precision applications worldwide.
Exhibits
PI's fast steering mirrors enable acquisition, tracking and stabilization of laser communication links in orbit. The configurable X-365 Precision XY Gantry System provides repeatable sub-micron positioning. PI provides positioning solutions for laboratory applications and scientific instrumentation, including the 6D NanoCube® for precise optical-element and fiber positioning in photonics and silicon photonics. The X-417 Integrated Multi-Axis combines high reliability with industrial-grade flexibility. For semiconductor manufacturing, PI provides high-precision motion and control solutions for photomask production, wafer cutting, DUV and EUV lithography, nanoimprint lithography, wafer and mask inspection, wafer metrology, wafer probing, laser wafer dicing, and back-end die and wire bonding, packaging, chip testing and die attachment. PI also provides positioning solutions for technology development, tool qualification, mask repair and test probe-card production outside the actual production process. These semiconductor applications use motion technologies that can move components with nanometer and sub-nanometer precision and high dynamics or hold positions precisely over extended periods. PI combines 50 years of experience in piezo technology and nanopositioning with sensors, piezo actuators, systems and motors, air-bearing motion systems with linear-motor drives, controllers, drive modules, software and firmware. EtherCAT®-based motion-controller and drive solutions from ACS support flexible, high-precision control of complex multi-axis systems, including intelligent gantry control and servo control for subnanometer standstill jitter. PI also highlights a wide range of high-precision motion and control technologies, high vertical integration in manufacturing, long-term reliability, a Copy Exactly Strategy, on-site support, customized service level agreements, ISO 5 cleanroom manufacturing with EUV requirements in mind, and a large patent portfolio. PI works with semiconductor equipment manufacturers from the design phase to select solutions for current requirements and future technology nodes, while individual service level agreements and global service hubs support rapid response and reliable process performance. PI identifies lithography as a decisive wafer-processing step and measurement and inspection as necessary at critical manufacturing points to support final-product quality, reliability and chip-production yield.
Capabilities and products
- sub-nanometer precision positioning technology
- piezo actuators and sensors
- fast steering mirrors for laser communications
- sub-micron XY gantry positioning systems
- precision optical-element and fiber positioning
- precision motion control for photomask production
- precision positioning for DUV/EUV lithography
- wafer and mask inspection positioning
- positioning for wafer CD, overlay and thickness metrology
- wafer-probing positioning
- laser wafer-dicing positioning
- positioning for die/wire bonding and packaging
- air-bearing motion systems with linear-motor drives
- EtherCAT® motion controllers and drives