At a glance
| Booth | J2840 |
| Country | TW |
| Website | www.pfeiffer-vacuum.com |
Company profile
Pfeiffer Vacuum Taiwan Corporation supplies turbomolecular vacuum pumps, dry vacuum pumps and measurement equipment for PVD, CVD, lithography, etch, implant and back-end applications. For inspection and metrology, the company provides low-vibration vacuum solutions, and its portfolio also includes vacuum leak detectors and contamination-management systems. Its manufacturing range includes vacuum flanges, valves, fittings and chambers as well as custom components for vacuum systems. Pfeiffer is part of the Busch Group, a manufacturer of vacuum pumps, vacuum systems, blowers, compressors and gas-abatement systems whose brands include Busch Vacuum Solutions and Pfeiffer Vacuum+Fab Solutions. The Taiwan location information identifies Pfeiffer Vacuum Taiwan Corporation as the local headquarters and also lists the same Taiwan company within Busch Group repair-center and semiconductor-service locations in Hsinchu County.
Exhibits
Our comprehensive service solutions are designed to maximize vacuum-equipment service life while minimizing downtime. Reliable products and expert support help keep systems operating at optimal performance. Service level agreements (SLA) are tailored to process requirements to help avoid unexpected downtime and maintain vacuum equipment at high efficiency. Regular maintenance and calibration are provided as preventive services that extend the life of vacuum solutions and support higher production capacity. The service model includes expert support and rapid response with an emphasis on long-term equipment performance and reliability. Skilled sales engineers and service technicians are distributed globally to provide hands-on support beyond the completion of an equipment transaction. For comprehensive Sub Fab management, Pfeiffer Vacuum+Fab Solutions offers on-site service concepts covering vacuum and gas-abatement systems and can tailor the field-service scope to specific manufacturing requirements. Hundreds of service engineers and technicians can be permanently stationed at customer sites, and the listed field-service teams are certified to ISO9001:2016, ISO14001:2015 and ISO45001:2018. The Sub Fab service description cites more than 30 years of vacuum and abatement-system repair experience together with workshop management, system and process consulting expertise. A Sub Fab engagement begins with analysis of the vacuum process and gas-abatement environment, including abatement systems, vacuum pumps, system components and their process requirements. The resulting service plan can cover abatement systems, vacuum pumps and related components, including foreline and exhaust service, parts cleaning, installation support, routine maintenance and required spare parts. The Sub Fab service portfolio also includes vacuum-pump refurbishment for semiconductor manufacturing and ARGOS preventive service for monitoring events and changes in a semiconductor fab. Pfeiffer Vacuum+Fab Solutions presents itself as a complete solution supplier for semiconductor manufacturing, with a portfolio extending from the cleanroom through the sub-fab and from vacuum chambers to gas-abatement systems. The semiconductor-fab model distinguishes three operating areas: the cleanroom for wafer processing, the subfloor area for utilities that support cleanroom operation, and the sub-fab area containing vacuum pumps, gas treatment and other systems needed for process stability, safety and environmental control. For cleanrooms, Pfeiffer supplies turbomolecular vacuum pumps, contamination-management systems and valves to maintain pressure and cleanliness while helping prevent wafer contamination as processes evolve. For the subfloor area, Pfeiffer is the first supplier certified by major semiconductor tool manufacturers to provide point-of-use vacuum pumps for load locks and transfer-tool chambers. These point-of-use solutions emphasize vacuum-pump performance, energy efficiency, low power consumption, compact footprints and low noise to support tool operation and simplify installation and maintenance. In the sub-fab, the portfolio includes dry vacuum pumps, gas-abatement systems and exhaust-management systems, with digital monitoring, lower power use, water and nitrogen savings, predictive maintenance and shortened on-site service activities used to reduce operating cost and downtime. Semiconductor vacuum applications identified by Pfeiffer include EUV lithography, load lock and transfer, ion sources, beam lines and end stations, CD-SEM, airborne molecular contamination, thin-film deposition, etch and cleaning. The semiconductor service offering covers repair, field service and technical support, plus product refurbishment, comprehensive sub-fab management, gas-abatement service and ARGOS predictive maintenance. The semiconductor product portfolio includes turbomolecular vacuum pumps, contamination-management systems, leak detectors, gas-abatement systems, dry vacuum pumps, vacuum valves, vacuum chambers and vacuum components. Dry-pump technologies listed for semiconductor use include multi-stage Roots pumps, screw pumps and scroll pumps, and custom vacuum systems can be designed across vacuum ranges from atmospheric pressure to ultra-high vacuum. Pfeiffer also describes vacuum as important across wafer technologies from conventional silicon to SiC and GaN and offers wide-temperature-range dry pumps for process gases ranging from sensitive precursors at low temperature to condensable gases at high temperature. Its sustainability approach for semiconductor manufacturing includes lowering power, water and nitrogen consumption, extending product life, reducing waste and using gas-abatement systems with high destruction and removal efficiency to reduce emissions. The semiconductor service-location network spans Europe, including Villach, Annecy, Dresden, East Kilbride, Le Versoud and Co Kildare. Across Asia-Pacific, listed semiconductor service locations include Wuxi, Xi’An, Hyderabad, Hiratsuka-city, Hwaseong-si, Kulim Kedah, Singapore, HsinChu, Nanjing and Pulau Pinang. In the Americas, listed locations include sites in Arizona, California, New Hampshire, Oregon and Texas, together with a gas-abatement service center in Hillsboro, Oregon. The location network combines general semiconductor vacuum service with dedicated gas-abatement-system service facilities in multiple regions. The same service-location material connects the network with product refurbishment, comprehensive sub-fab management and gas-abatement service offerings for semiconductor manufacturing. ARGOS is a comprehensive on-site predictive-maintenance service for semiconductor fabs that monitors events and changes in vacuum and abatement equipment and is designed to keep high-impact critical equipment available. In a semiconductor fab, 20-25% of vacuum pumps and abatement systems are typically classified as critical equipment, making continuous monitoring important for keeping the overall process running. ARGOS uses continuous real-time monitoring to track equipment performance and can predict equipment failures or required maintenance before an interruption occurs, with a stated goal of reducing equipment downtime by at least 50%. Installation uses an ARGOS box as a plug-and-play gateway connected by three cables, allowing monitoring to be added without shutting down the vacuum equipment or interrupting the manufacturing process. The service is built on standardized Industry 4.0 interfaces and an on-premises architecture, with captured information retained on servers inside the semiconductor fab rather than sent through an external internet or cloud connection. A predictive-maintenance engineer builds a digital twin of the fab’s physical assets, tracks vacuum-pump installation and removal, and works with ARGOS as it continuously monitors the installed equipment. ARGOS applies predictive machine-learning techniques to detect potential anomalies, generate alarms and support engineer classification and analysis so false alarms can be distinguished from serious developing problems. Monitoring can include exhaust pressure, inlet pressure, energy consumption, operating hours, remaining time before the next planned maintenance, vibration level, exhaust back pressure, exhaust temperature, vacuum-pump temperature and cooling-water flow. The service provides weekly reports summarizing the previous seven days, monthly reports on the overall performance of monitored equipment, and weekly service plans highlighting higher-risk pumps, pump health, operating time and equipment approaching target service life. Unexpected failures or abnormal behavior are investigated through root-cause analysis, followed by a report and implementation of corrective solutions intended to prevent recurrence. Gas-abatement service is available through remote support or on-site service and includes 24/7 customer support, routine service, maintenance, replacement and wear parts, dry-bed absorber refilling and training. Support can include supplying parts and guiding installation by telephone or augmented-reality technology, with a global technician network available for on-site system repair. Commissioning includes on-site setting of operating parameters, checks that system components operate safely and correctly, a technical briefing for the customer team and a written acceptance report. Annual or semiannual system inspections include complete operating checks and sensor tests, with verification of parameter settings, trigger parameters and alarm limits and a formal inspection record. FTIR gas measurement uses infrared measurement to evaluate equipment performance and the type and concentration of process gases, supported by a database covering hydrocarbons, organic compounds and inorganic compounds. Maintenance contracts include M1 monthly service, M2 semiannual service and M3 annual service, plus full-service arrangements with around-the-clock standby support. For CT-D dry-bed absorbers, Pfeiffer provides refilling and disposal of spent granules, using a patented reusable granule container certified by the United Nations for transport of hazardous goods, and training is offered in two levels covering operation and then maintenance, repair and troubleshooting. For airborne molecular contamination (AMC), Pfeiffer provides real-time cleanroom monitoring solutions with sensitivity ranging from parts per billion (ppb) to parts per trillion (ppt) for semiconductor fabs. The company also provides in-line monitoring systems for semiconductor manufacturing fabs and R&D centers, with AMC monitoring intended to detect contamination early before critical wafer defects occur. FOUP monitoring addresses both AMC and particles because wafers can spend almost 70% of their manufacturing cycle in Front Opening Universal Pods while moving between process tools. Cleanroom AMC monitoring requirements listed by Pfeiffer include zero footprint in the cleanroom, real-time fab monitoring, monitoring across multiple fab areas, inorganic and organic compound monitoring and detection down to 100 ppt. FOUP monitoring can be used to study queue-time optimization, support process-tool ramp-up, process wafers for tool tuning, determine whether a FOUP needs cleaning and check FOUP-cleaner efficiency. Named metrology tools include Pod Analyzer (APA) for AMC in FOUPs, Dry Particle Counter (ADPC) for particles in FOUPs and FOSB, and Ambient Multi Port Controlling (AMPC) for fab-environment monitoring. For decontamination, Pod Regenerator (APR) is listed as a tool for removing AMC and humidity from FOUPs and wafers, completing the monitoring portfolio with a corrective decontamination function.
Capabilities and products
- turbomolecular vacuum pumps
- semiconductor dry vacuum pumps
- vacuum measurement equipment
- low-vibration vacuum solutions
- vacuum leak detectors
- semiconductor contamination management systems
- vacuum flanges, valves, fittings and chambers
- custom vacuum-system components
- semiconductor gas-abatement systems
- point-of-use vacuum pumps for load locks
- semiconductor vacuum-pump refurbishment
- ARGOS semiconductor predictive maintenance
- real-time cleanroom AMC monitoring
- FOUP AMC and particle monitoring
- comprehensive semiconductor sub-fab management
- gas-abatement system service