At a glance
| Booth | N0033 |
| Country | JP |
| Website | www.dalton.co.jp |
Company profile
DALTON CORPORATION provides custom equipment design tailored to wafers and applications without being constrained by existing equipment or specifications. At its test centre in Sumida, Tokyo, customers can test stripping and cleaning processes in both batch and single-wafer formats and can try different processing conditions together with company staff. The semiconductor-equipment business covers needs from research and development through dedicated machines for different scales of production, explicitly spanning the research phase to mass-production level. The Tokyo Test Center provides a variety of test machines intended to let customers evaluate and select equipment before moving toward production use. DALTON CORPORATION released an English site for its semiconductor equipment on 2020.11.04 as part of its semiconductor-equipment information offering.
Exhibits
DALTON CORPORATION handles carbonisation equipment using biomass technology to turn waste into resources and equipment that cleans semiconductors with environmentally friendly ozone. An optional ozone-water cleaning function is available as part of the equipment options. Adjusting the blend ratio can cause reaction heat to rise to the desired temperature; this capability is provided alongside the optional ozone-water cleaning function among the available equipment features. The semiconductor product line includes lift-off equipment as one of its named equipment categories. Lift-off equipment options are also included as a separate item within the semiconductor equipment range. Organic peeling and cleaning equipment is included in the line for semiconductor processes requiring stripping and cleaning operations. Etching and cleaning equipment is another listed category, with jig-cleaning and silica-tube-cleaning equipment included within that group. Porous-silicon formation equipment is offered, with anode-oxidation equipment identified in the same product category. Other semiconductor equipment includes chemical-supply equipment, chemical-collecting equipment and solvent recyclers. These equipment categories are positioned for customer needs ranging from research and development to dedicated production machines at different scales. The product-selection workflow is supported by safety measures and a test-machine lineup, with testing available through the Tokyo Test Center. For stripping and cleaning, the test environment supports both batch processing and single-wafer processing rather than limiting evaluation to only one handling method. Customers can vary processing conditions during those tests together with DALTON CORPORATION staff, linking equipment selection to hands-on process evaluation. The custom-design approach can therefore be applied according to both wafer requirements and the intended use, instead of being restricted to an existing standard specification. For cleaning applications, the portfolio combines conventional semiconductor stripping and cleaning equipment with ozone-based semiconductor purification equipment and an optional ozone-water cleaning function. For resource-recovery applications, the biomass-based carbonisation equipment is presented as technology for converting waste into resources. Across the listed range, DALTON CORPORATION connects equipment supply, process testing and application-specific custom design from early development work through mass-production-level needs.
Capabilities and products
- lift-off equipment
- organic stripping and cleaning equipment
- etching and cleaning equipment
- jig and silica-tube cleaning equipment
- porous-silicon formation equipment
- anodic oxidation equipment
- chemical supply and collection equipment
- solvent recyclers
- ozone-water cleaning function
- custom equipment design for wafers and applications