At a glance
| Booth | L1000 |
| Country | TW |
| Product categories | Defect; Particle; Bump; Contamination Detection, Review or Inspection · Film Thickness; Thickness; Uniformity Measurement; Ellipsometer · Line Width; Critical Dimension (CD) Measurement · Wafer; Substrate Metrology; Topology; Nanotopography; Flatness Measurement; Crystalline Orientation · X-ray; XRF; 3-D X-Ray; LEXES Systems |
| Website | www.novami.com |
Company profile
Nova Ltd. is a leading innovator and key provider of material, dimensional, and chemical metrology solutions for advanced process control in semiconductor manufacturing. Nova delivers continuous innovation by providing state-of-the-art high-performance metrology solutions for Logic, Memory, Advanced Packaging, and Specialty Devices throughout the fabrication lifecycle. Nova’s product portfolio, which combines high-precision hardware and cutting-edge software, provides its customers with deep insight into developing and producing the most advanced semiconductor devices. Nova’s unique capability to deliver innovative solutions enables its customers to improve performance, enhance product yields, and accelerate time to market. Nova acts as a partner to semiconductor manufacturers from its offices worldwide. Nova develops its solutions through R&D centers in Israel, Germany, and the USA. Nova serves its customer base through dedicated customer operations and service centers around the world.
Capabilities and products
- chemical metrology solutions for semiconductor process control
- critical dimension (CD) measurement
- defect, particle, bump, and contamination inspection
- dimensional metrology solutions for semiconductor process control
- ellipsometer metrology
- film thickness and uniformity measurement
- material metrology solutions for semiconductor process control
- metrology for Logic, Memory, Advanced Packaging, and Specialty Devices