At a glance
| Booth | L1000 |
| Country | TW |
| Website | www.novami.com |
Company profile
Nova Ltd. provides material, dimensional, and chemical metrology solutions for advanced process control in semiconductor manufacturing. Its metrology portfolio supports Logic, Memory, Advanced Packaging, and Specialty Devices throughout the fabrication lifecycle. Nova combines high-precision hardware with software to give semiconductor manufacturers insight into the development and production of advanced devices. The company states that its solutions are used to improve device performance, enhance product yields, and accelerate time to market. Nova works as a partner to semiconductor manufacturers through offices worldwide and develops solutions through R&D centers in Israel, Germany, and the USA. Dedicated customer operations and service centers around the world support its customer base.
Exhibits
Nova software solutions form a metrology intelligence layer that rapidly interprets complex signals, guides process adjustments, and applies them across tool fleets with consistent governance. Working with Nova hardware technologies, the software suite is designed to handle complex structures at advanced technology nodes and to help fabs solve problems quickly, scale operations, and act proactively. Nova Fit® is a machine-learning hub that uses machine learning and data-driven algorithms to extract more value from measurement data, tighten process windows, avoid process excursions, and improve yield. Nova Fit® also uses physical parameters from Nova MARS® and data analysis from Nova Fleet Management® to improve metrology performance, shorten time to solution, and expand the metrology envelope for process control. Nova Hub is a fleet-management suite for large fleets of Nova metrology tools, providing connectivity, fast data access, and manufacturing productivity functions. Within Nova Hub, FleetBoost provides tools for bringing a fleet into optimal operation while giving real-time visibility into measurement data. FleetView supplies fleet-level operational reports and tools for quality-performance tracking, troubleshooting, and decision-making on corrective actions. The Nova Hub Server provides the computing foundation for fleet-level metrology intelligence using GPU-accelerated compute and Kubernetes automation to support AI-driven analytics and scalable application deployment. Nova MARS® is a multi-channel metrology modeling solution for semiconductor manufacturing that combines physical modeling, machine learning, and hybrid approaches for precise optical CD analysis. Nova MARS® supports complex 2D and 3D structures and is intended to help manufacturers optimize processes, accelerate time-to-solution, and address next-generation device fabrication. Nova QED is an offline recipe-creation and data-analysis platform loaded on a Nova-provided laptop, with an interface for analyzing spectra and optimizing production recipes for Nova VeraFlex® platforms. Nova RACS is a centrally networked server solution that combines hardware and software and integrates with a fab IT network to manage multiple Nova VeraFlex® systems. Nova RACS is used for matching fleets of tools and for feed-forward performance options in process flows that contain repetitive layers in the film stack. Across the manufacturing journey, Nova presents the software layer as a focused way to support peak performance while maintaining alignment between insight, process adjustment, and action.
Capabilities and products
- semiconductor material metrology
- semiconductor dimensional metrology
- semiconductor chemical metrology
- machine-learning metrology data analytics (Nova Fit®)
- metrology tool-fleet management (Nova Hub)
- real-time metrology fleet data visibility (FleetBoost)
- fleet quality tracking and troubleshooting (FleetView)
- GPU/Kubernetes metrology-intelligence platform (Nova Hub Server)
- optical CD metrology modeling (Nova MARS®)
- offline recipe creation and data analysis (Nova QED)
- networked VeraFlex® fleet management (Nova RACS)