At a glance
| Booth | R7724 |
| Country | DE |
| Website | www.notion-systems.com |
Company profile
Notion Systems is a One Stop Solution Provider. With decades of expertise in photolithography and wet processing and inkjet printing of functional materials, we cover all steps for scaling processes from lab to industrial production. Product lines: photolithography and wet processing tools up to 150 mm (n.amr semi-automated processing systems, n.amc fully-automated processing systems); photolithography and wet processing tools for 200-300 mm (n.unixx semi-automatic systems for lab applications, n.varixx automatic combined cluster systems, n.chemixx wet processing systems, n.maxx systems for large substrates); lab cluster tools (automated litho cluster tool, automated PV cluster tool); inkjet printing systems; and industrial solutions for display, electronics and semiconductor. We offer inkjet solutions for the semiconductor industry: the n.jet semicon series offers a wide range of processes for frontend as well as backend processes in the semiconductor industry. The system comes with integrated edge handling for any substrate type or wafer size, integration with the MES system (e.g., SECS-GEM), and state-of-the-art pre- and post-processing modules. Our nozzle replacement strategies and our full process control improve yield and process stability. The system can be combined with high-precision dispensing units that further enlarge the window of processable materials within the same platform. Main features: high precision inkjet printing, drop placement accuracy of better than 5 micron, high uniformity, up to 8 different fluids in one print, and support for printheads from all major manufacturers. Inkjet is a non-contact, digital printing technology which creates fine structures of 30 microns and below; the fully digital non-contact printing enables wet-on-wet processing without the need for masks or screens, replaces established subtractive process sequences, and reduces waste and energy consumption. Inkjet is very fast, with up to 100,000 droplets per second per nozzle, and highly parallel, typically more than 10,000 nozzles per print unit at a pitch of 20-200 micrometres. The company also runs an R&D and application centre in Singen and the Notion Advanced Application Center in Schwetzingen, and offers platform engineering.
Exhibits
Photolithography and wet-processing tools include n.amr and n.amc systems up to 150 mm, and n.unixx, n.varixx, n.chemixx and n.maxx systems for 200–300 mm and large substrates; automated lithography and PV lab cluster tools; and inkjet-printing systems including the n.jet semicon series. Also provides industrial solutions and platform engineering.
Capabilities and products
- inkjet printing systems for functional materials
- n.jet semicon series for semiconductor inkjet processes
- drop placement accuracy better than 5 micron
- up to 8 different fluids in one print
- printing of fine structures of 30 microns and below
- MES and SECS-GEM system integration
- n.amr and n.amc photolithography and wet processing tools
- n.varixx cluster and n.chemixx wet processing systems
- up to 100,000 droplets per second per nozzle
- automated litho and PV cluster tools
- maskless wet-on-wet processing