At a glance
| Booth | H0009 |
| Country | JP |
| Website | www.nanosystem-solutions.com |
Company profile
We have been engaged in the development and manufacture of various inspection and measurement equipment in semiconductor manufacturing processes, and through work that responds to our customers' advanced requirements we have continued to refine our technology. We have now succeeded in bringing forth the "maskless exposure system DL-1000." This system reflects the Digital Micromirror Device (DMD) together with extremely high-level know-how in the proprietary optical technology we have cultivated to date. The core of microfabrication technology is, without question, the lithography process, and we believe the completed "maskless exposure system DL-1000" is a system that can be expected to dramatically increase the speed of technological development across a wide range of fields, including semiconductors, LCDs, and biotechnology. In addition, we also carry out the development and commercialization of special lasers. Through this, we will also focus on laser processing equipment that can directly process materials. We will continue to concentrate on the field of optical technology that handles "light," which holds great potential, advancing the development of new light sources and the development and provision of special optical products incorporated into precision instruments used in various fields. Semiconductor devices are fabricated on crystals based on silicon (Si). For many years we have brought to market various inspection systems for these Si crystals, namely Si wafers. Among them, we are confident that our measurement and inspection technology related to the flatness of Si wafers, commercialized through the fusion of advanced optical technology and image processing technology, is a technology of which we can be proud on a global scale. Based on such technologies that constitute our core competence, we offer a lineup of unique inspection systems. We possess know-how in optical and image-processing technology sufficient to handle a variety of special measurement and inspection applications. We are advancing the commercialization of a foundry business utilizing our original maskless exposure systems and laser processing equipment. At our own factory, we are engaged in a contract processing business for precision molds and special glass including sapphire.
Capabilities and products
- Digital Micromirror Device (DMD) optical exposure technology
- Si wafer flatness measurement and inspection
- advanced optical and image-processing inspection for Si wafers
- foundry business with maskless exposure and laser processing
- laser processing equipment for direct material processing
- lithography process system for semiconductors, LCDs and biotechnology
- maskless exposure system DL-1000
- special lasers development and commercialization