At a glance
| Booth | P6118 |
| Country | US |
| Website | www.mspcorp.com |
Company profile
MSP Corporation, a Division of TSI®, develops precision instrumentation and related solutions across pharmaceutical inhaler testing, aerosol science, thin-film deposition, surface inspection and semiconductor manufacturing. From its beginnings in Minnesota, MSP built expertise in particle technology, vapor delivery and surface inspection while addressing measurement challenges in applications where accuracy and reliability are important. Over time, its products have supported respiratory-therapy research, semiconductor manufacturing and scientific work, including applications intended to improve chip-production yield. MSP serves global customers ranging from research laboratories to high-volume manufacturing fabs, and its portfolio includes regulatory-compliant pharmaceutical testing systems, vaporizers, particle-deposition tools and calibration standards. The company now operates as MSP, a Division of TSI®, and continues to work across life-sciences and semiconductor markets with an emphasis on measurement-based process and product improvement. Since joining TSI in 2016, MSP has continued to provide tools intended to improve processes, product quality and efficiency across industries. MSP has been recognized for workplace safety and health and is among 200 employers honored through an awards program coordinated by the Minnesota Safety Council. For semiconductor particle work, MSP explains that dry deposition can provide better particle-size accuracy and more uniform distribution than wet methods while avoiding liquid residuals that can compromise measurement integrity in precision applications. The company connects that greater deposition precision with semiconductor manufacturers' objective of maximizing yield. For liquid flow controllers, MSP uses PID tuning of Proportional, Integral and Derivative parameters to optimize response and states that the system can reach response times as fast as 0.3 seconds to within ±1 % of set-point. In pharmaceutical testing, MSP also applies purpose-built technology to inhaled dissolution testing to help developers generate reproducible, regulator-ready results.
Exhibits
MSP provides semiconductor-manufacturing tools for process control, quality assurance and cleanroom monitoring, with application areas that include cleanroom air-quality monitoring, parts-cleanliness testing, particle detection in high-purity gases, surface-defect inspection, thin-film deposition and removal, and ultrapure-water monitoring. For cleanrooms, the portfolio includes airborne-particle contamination monitoring for cleanroom audits; for parts, it includes cleanliness testing intended for electronics production. Particle detection in high-purity gases is used to reduce electronic-defect risk, while surface-defect inspection is directed at detecting and mitigating defects in electronics. For ultrapure water, MSP lists nanoparticle detection down to 10 nm, and for semiconductor environments it also describes technology capable of detecting particles as small as 2 nm to help manage contamination risk and process integrity. TSI particle counters support real-time contamination detection for process optimization and manufacturing efficiency, while MSP Particle Deposition Systems can deposit particles as small as 10 nm for repeatable calibration of semiconductor inspection tools. MSP Turbo II™ Vaporizers are used for consistent thin-film deposition in Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD), and the broader semiconductor portfolio includes particle counters, contamination-control systems, vaporizers and contamination standards for inspection-tool calibration. The semiconductor vapor-delivery lineup includes Turbo II™ vaporizers, vapor/gas filters and liquid flow controllers for precise vapor delivery, thin-film quality and wafer-yield improvement. A Direct Liquid Injection (DLI) system combines components that work together to provide stable and consistent vaporization. MSP also provides particle-deposition systems, certified contamination standards and particle suspensions to calibrate and optimize wafer and reticle inspection tools as well as wafer and mask cleaning equipment. The 2300G3 Particle Deposition System is offered for wafer-inspection-tool calibration, together with certified Wafer and Reticle Contamination Standards, particle suspensions and NanoSilica™ size standards for inspection-system calibration and qualification. Metrology products further include Particle Deposition Systems, Particle Size Standards, Wafer & Reticle Contamination Standards, and PRE Challenge Wafers and Photomasks. For pharmaceutical manufacturing, MSP provides precision instrumentation and automated systems for Aerodynamic Particle Size Distribution (APSD), Delivered Dose Uniformity (DDU) and In Vitro In Vivo Correlation (IVIVC) testing. APSD testing is used to help ensure inhaler drugs reach the target area in the lungs, DDU supports precise and consistent medication delivery, and IVIVC relates testing to real-world drug behavior to support efficient drug development. As a co-developer of the NGI, MSP offers tools for APSD, DDU and IVIVC testing and, in partnership with Copley Scientific, provides complete automated systems for MDIs, DPIs and nebulizers. The pharmaceutical product range also lists NGI and NGI Plus, Flow Controllers, Inhaler Testing Automation and Lab Organization, In Vitro In Vivo Correlation IVIVC Equipment, Abbreviated Impactor Measurement (AIM) Equipment and Generic Drug Development Equipment.
Capabilities and products
- cleanroom airborne particle monitoring
- electronics parts cleanliness testing
- particle detection in high-purity gases
- semiconductor surface defect inspection
- 10 nm nanoparticle detection in ultrapure water
- vapor delivery and thin-film deposition for ALD/CVD
- wafer and reticle inspection-tool calibration standards
- inhaler APSD/DDU/IVIVC testing
- automated testing systems for MDIs, DPIs and nebulizers
- 2 nm particle detection for semiconductor manufacturing
- 10 nm particle deposition