At a glance
| Booth | R8204 |
| Country | KR |
| Website | www.mkpsemi.com |
Company profile
MKP Co., Ltd. develops and manufactures MFC, or Mass Flow Controller, products used as core components in semiconductor-manufacturing processes. The company describes itself as Korea's first and only company to have succeeded in developing and manufacturing MFC products, replacing a market that had relied entirely on foreign products. MKP Co., Ltd. applies patented technologies to MFC products and produces them in large quantities for the semiconductor market. Its stated corporate direction is continued innovation while strengthening company scale and stability for long-term growth. MKP Co., Ltd. also emphasizes employee confidence, a positive workplace, and sharing improved value with customers as part of that growth direction.
Exhibits
MKP Co., Ltd. organizes its product offering into Gas Solution, Liquid Solution, and Pressure Solution categories. The listed control and measurement products include pressure-sensor-based MFC, thermal-sensor-based MFC, thermal-sensor-based MFM, High Temperature MFC, and Flow Ratio Controller products. Named series include MARU9000, MARU7000, MARU5000, MARU3000, ARA5000, MARU8000HT, and MADEE5000. MARU5000 is an MFC for semiconductor-manufacturing processes with a stated flow-rate range from 5 sccm to 200 SLM and is used primarily in dry etch and CVD processes for semiconductor and display manufacturing. The MARU5000s Compact is a slim version for varied installation environments, and the series includes digital and thermal-type MFC configurations. The MARU5000s Compact type is registered as part of Samsung Electronics Common Spec., supporting use across multiple customer environments. The Digital Standard MFC description specifies a response time of no more than 1 second, accuracy of no more than 1% of set point, and electropolished corrosion-resistant surfaces below 0.1 μm RA. Compact-type availability, MGMR function availability, and D-NET, EtherCAT, RS485, and Analog V&A communication are listed among MARU5000 features. MARU5000s models listed include 5000, 5001, 5002, 5010, 5011, 5012, 5020, 5021, 5022, 5030, 5031, 5032, 5000C, 5002C, 5010C, and 5012C. The flow ranges are grouped as 5 SCCM to 30 SLM, 30 SLM to 50 SLM, 50 SLM to 100 SLM, and 100 SLM to 200 SLM, with a flow-rate control range of 2 to 100% of full scale. Accuracy is specified as no more than ±0.25% of full scale from 2 to 25% and no more than ±1.0% of set point from 25 to 100%, with repeatability no more than ±0.15% of full scale. At valve shutdown, inner leak specifications shown include no more than 0.01% or 0.1% of full scale depending on configuration, while zero stability is no more than ±0.5% of full scale per year. The temperature coefficient is listed as 0.01% of full scale per °C, and wetted surfaces use STS316L VIM VAR with electropolishing below 0.1 μm RA. Valve-seat materials are METAL or PTFE, the seal type is METAL, and helium leak integrity is specified at no more than 5×10^-12 Pa·m3/s. The operating-temperature range is 5 to 50°C with 15 to 35°C recommended, and warm-up time is 30 minutes with accuracy guaranteed after 60 minutes. Operating differential-pressure values shown include at least 50 kPa(D) and at least 250 kPa(D), while maximum inlet-pressure values shown include 300 kPa(G) and 450 kPa(G), with burst pressure at 1,500 kPa(G). Power requirements are +15 to 24 VDC at 7.2 W maximum or ±15 VDC at 6 W maximum, and the listed valve type is a normally closed solenoid.
Capabilities and products
- pressure-sensor-based MFC
- thermal-sensor-based MFC
- thermal-sensor-based MFM
- high-temperature MFC
- flow ratio controllers
- 5 sccm to 200 SLM semiconductor MFC