At a glance
| Booth | K2288 |
| Country | TW |
| Website | micro-epsilon.tw |
Company profile
Micro-Epsilon Taiwan is a daughter company of Micro-Epsilon Group, and Micro-Epsilon is among the leading sensor manufacturers worldwide. For more than 50 years, Micro-Epsilon has continuously offered reliable, high-performance and unique solutions, particularly for applications that require high-precision measurement or inspection. Its product range covers sensors for distance and displacement measurement, sensors for IR temperature measurement and color detection, and systems for dimensional measurement and defect detection. The group attributes its high-precision products to intensive research and development, unique know-how and a broad network of collaborative operations used to develop high-performance measurement systems. Micro-Epsilon treats customers as business partners and positions greater measurement precision as a way for its products to provide a competitive advantage in demanding inspection and measurement tasks. For semiconductor customers, Micro-Epsilon describes consultation, development and production from a single source, together with customer collaboration in series and OEM applications and technological and practical knowledge in semiconductor production.
Exhibits
Micro-Epsilon Taiwan provides customized capacitive measurement systems when standard capacitive sensors and controllers reach their performance limits, with adaptations including structural design changes, target calibration, mounting options, customized cable lengths, measurement-range adjustments and sensors with integrated electronics. Capacitive sensors using Embedded Capa Technology embed electrodes in a particularly stable carrier material to improve long-term and temperature stability, and the technology enables sensor designs for -270 °C to +200 °C. Micro-Epsilon capacitive displacement sensors are used in vacuum and cleanroom applications where nanometre-level resolution can be achieved, and the sensors, cables and feedthroughs have clean characteristics suitable for class 1 cleanrooms. For semiconductor production, Micro-Epsilon provides sensor solutions for complex front-end processes, back-end applications and wafer-fab automation, addressing small movements, tolerance deviations and process monitoring near physical limits. Its semiconductor sensors operate in applications involving high acceleration, strong magnetic fields and ultra-high vacuums and can monitor photomask and lens-system orientation, positioning during wafer handling, and the position of mirrors and optical elements. The semiconductor sensor portfolio includes confocal chromatic sensors for high-resolution measurements, white light interferometers for absolute distance measurements, eddy-current sensors, capacitive sensors with nanometre-scale accuracy, 3D deflectometry sensors for wafer inspection, wavefront sensors for optical-system monitoring, color sensors, and optical micrometers for precise edge inspection. Micro-Epsilon develops and produces adapted sensor and actuator solutions for series applications and uses manufacturing methods and capacities intended for operation in challenging semiconductor environments. Its manufacturing and testing processes cover electronics selection and placement, mechanical manufacturing and special process technologies, with application-specific sensor materials used for semiconductor requirements. Listed process capabilities include USP laser technology, high-temperature vacuum soldering, precision manufacturing, burn-in tests, fully automated potting lines, passivation and coating of components and switch groups, customer-adapted sensor design, low outgassing, vacuum suitability, cleaning options, UHV-compliant technologies, connection technologies, and semiconductor-suitable labeling and packaging. Across semiconductor applications, the solutions extend from precise machine positioning to wafer inspection and topography measurements and are used in both front-end and back-end processes. Semiconductor production lines are described as requiring current sensor technology to meet increasingly stringent quality and cost requirements, including accurate detection of very small movements, reliable recognition of slight tolerance exceedance and monitoring of processes near physical limits. The semiconductor page also states that Micro-Epsilon sensor technology has been used successfully in the semiconductor industry for many years and that all sensors and systems for these demanding applications undergo rigorous manufacturing and testing processes.
Capabilities and products
- distance and displacement sensors
- IR temperature measurement sensors
- color detection sensors
- dimensional measurement systems
- defect detection systems
- confocal chromatic sensors
- white-light interferometers
- 3D deflectometry sensors for wafer inspection