At a glance
| Booth | Q6158 |
| Country | CA |
| Website | meaglow.com |
Company profile
Meaglow produces a range of plasma sources, including custom plasma sources, based on its patented hollow cathode technology. To date we have sold over 190 units to 16 different countries with growing sales to original equipment manufacturers. Our customers include the NASA Goddard Space Flight Center, LAM Research, US Naval Research, and many more. Legacy ICP and microwave plasma sources include a dielectric window, often made of quartz or sapphire, these windows can be etched causing oxygen contamination in non-oxide films. Meaglow's hollow cathodes are all metal elliminating that source of oxygen contamination. We are happy to work closely our customers to help them find solutions to their problems and have also built some custom made ALD systems (systems not available elsewhere) when customer needs arise.
Exhibits
Plasma sources, including custom plasma sources based on patented hollow-cathode technology, all-metal hollow cathodes, and custom-built ALD systems for specific customer needs.
Capabilities and products
- plasma sources based on patented hollow cathode technology
- over 190 units sold to 16 different countries
- customers include NASA Goddard Space Flight Center and LAM Research
- all-metal hollow cathodes eliminating oxygen contamination
- custom made ALD systems