At a glance
| Booth | R7321 |
| Country | JP |
| Website | www.lintec-mfc.co.jp |
Company profile
LINTEC Co., Ltd. was founded in 1987 as a manufacturer of gas mass flow controllers for the semiconductor industry. The company develops gas and liquid flow-control, vaporization and heat-exchange technologies for semiconductor manufacturing and describes itself as a pioneer in fluid-control technology. LINTEC Co., Ltd. became the first company in the world to develop a liquid mass flow controller and a vaporization system for precise control of TEOS flow rates. Its core offerings include gas and liquid mass flow controllers, high-efficiency compact heat exchangers and customized cabinets that integrate company products around customer requirements. Design, production and quality-assurance inspection are consolidated in-house, and the company describes itself as both a planning and development laboratory and a technology-driven organization. Products for gas and liquid applications are based on in-house R&D and serve semiconductors, FPD, PV and other precision-measurement sectors. The company states that it has a customer base in Asia and America and continues to expand its business globally. Its quality policy calls for service and products intended to meet customer expectations, and LINTEC Co., Ltd. lists ISO 9001.
Exhibits
A liquid mass flow controller automatically controls liquid mass flow, while a liquid mass flow meter measures liquid mass flow. The control principle combines mass-flow measurement using heat capacity with PID control of a flow-control valve, adjusting valve opening to regulate mass flow automatically. LINTEC Co., Ltd. developed liquid mass-flow technology in response to semiconductor demand for liquid-vapor delivery of materials such as TEOS, and the company describes precise, stable control of minute liquid flows as essential in semiconductor film-deposition processes. Liquid sources such as TEOS can offer advantages in price and handling compared with gases, while newer low-vapor-pressure materials and higher supply volumes create demand for direct vaporization with fewer temperature constraints. Because direct vaporization controls the reaction-gas flow in the liquid phase, the company emphasizes the effect of small liquid-flow errors on the reaction. Using H2O as an example, 1ml in the liquid phase expands to 1,244ml when vaporized under ideal conditions, illustrating why high-precision control of minute liquid flow is important before vaporization. For flows below 1ml/min, metering pumps can create pulsation through mechanical switching, while syringe pumps avoid pulsation but are not suited to continuous supply because of limited pump volume. The liquid mass flow controller instead receives liquid pressurized to a constant pressure, detects instantaneous flow with an internal sensor and continuously controls valve opening, allowing constant flow control whether downstream pressure is reduced or atmospheric. The LM-3000L high-performance liquid mass flow meter is listed for minute-liquid-flow measurement and includes a PID control signal for use with a vaporizer or CV, a metal seal and clean construction, with a high-temperature option. The LC-3000L high-performance liquid mass flow controller is listed for minute-liquid-flow control with a metal seal and clean construction. The CV-1000 liquid control valve is described as a proportional solenoid valve with a metal seal and clean construction. The RP-310 mass-flow power display and setting unit supplies power to a mass flow controller and provides flow setting and display in one unit. When connected to a mass flow controller with its dedicated cable, the RP-310 can set and control flow without a computer or PLC and can display both instantaneous and accumulated flow. The wider flow-control lineup includes MFC/MFM products, an MFC for O3 flow control, a 0.2sec fast-response MFC and MFC products for liquids. Vaporization products include a vaporizer, high-efficiency vaporizer, quartz vaporizer, high-flow-rate vaporizer and non-carrier-gas vaporizer. Heat-exchange products include compact, high-flow-rate and high-temperature heat exchangers, while customized cabinets can integrate LINTEC Co., Ltd. products to match customer needs.
Capabilities and products
- semiconductor gas mass-flow-controller manufacturing
- TEOS precision-flow vaporization system
- MFC for O3 flow control
- 0.2sec fast-response MFC
- liquid mass flow controller
- high-efficiency vaporizer
- quartz vaporizer
- high-flow-rate vaporizer
- non-carrier-gas vaporizer
- compact heat exchanger
- high-flow-rate heat exchanger
- high-temperature heat exchanger
- customized integrated equipment cabinets
- minute-liquid-flow mass flow meter
- proportional-solenoid liquid control valve
- MFC flow setting and display without a PC or PLC