At a glance
| Booth | M0858 |
| Country | TW |
| Website | www.lamresearch.com/process/semsysco |
Company profile
Lam Research Corporation is a global supplier of innovative wafer fabrication equipment and services to the semiconductor industry. Its equipment and services allow customers to build smaller devices. They are also intended to help customers build better-performing devices, and Lam Research Corporation states that nearly every advanced chip today is built with Lam technology. Lam Research Corporation combines superior systems engineering with technology leadership. It also emphasizes a strong values-based culture and an unwavering commitment to customers. Lam Research Corporation is a FORTUNE 500® company. It is headquartered in Fremont, Calif. Its operations extend around the globe. Within panel processing, the company applies wafer-scale processing capability and quality to markets associated with continued substrate scaling, panel-level packaging and microLED display technology. The panel-processing product page lists ISO 9001:2015 certification alongside quality-assurance information for this equipment business.
Exhibits
Lam Research Corporation brings wafer-scale processing capability and quality to the panel market, supporting continued scaling in the substrate market, expansion of the PLP market and the development path toward microLED display technology. Panel Processing is described as enabling continued semiconductor scaling as the industry moves toward chiplets and Heterogeneous Integration for next-generation semiconductor products. Lam Research Corporation provides technology and equipment for plating, wet strip, clean and etch processes in panel-processing markets. Its systems and technology cover panel-processing steps including RDL, Pads, FLI, Cu Pillar, Cu Buildup and TGV layers. Lam Research Corporation states that its panel process equipment provides the precision, performance and flexibility needed for a wide range of challenging device applications. The Kallisto Product Family is an Electrochemical Deposition, or ECD, platform described as an advanced vertical-processing platform for wet chemical treatment of substrates from 300x300mm up to Gen 5.1 (1100 x 1300mm). Kallisto is associated with application areas including Advanced Memory, Advanced Packaging, Advanced Substrates, Analog & Mixed Signal, Automotive, Discrete & Power Devices, Mini/Micro LED, Optoelectronics & Photonics and Panel Level Fanout. The Phoenix Product Family combines Electrochemical Deposition with PR-Development, PR-Strip and Wet Clean/Strip process categories. Phoenix provides fully automated high-volume panel processing for 510x515mm substrates. Phoenix is also mapped to Advanced Memory, Advanced Packaging, Advanced Substrates, Analog & Mixed Signal, Automotive, Discrete & Power Devices, Mini/Micro LED, Optoelectronics & Photonics and Panel Level Fanout applications. Together, Kallisto and Phoenix extend Lam Research Corporation's wafer-processing experience into larger substrate and panel formats while covering deposition, photoresist-related processing, wet cleaning, stripping and etching-related panel manufacturing needs. The Kallisto wet-chemical treatment platform is explicitly described as tailored to the needs of the semiconductor industry. The panel-processing product page organizes the equipment around two named product families, Kallisto and Phoenix.
Capabilities and products
- panel plating process equipment
- panel wet-strip equipment
- panel wet-clean equipment
- panel etch equipment
- large-substrate wet-chemical processing equipment
- 510x515mm fully automated high-volume panel processing
- panel photoresist-development equipment