At a glance
| Booth | N0886 |
| Country | TW |
| Product categories | Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD · Epitaxy Equipment; Epi Reactors; Molecular Beam Epitaxy (MBE); Atomic Layer Epitaxy (ALE) · Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment |
Company profile
KOKUSAI ELECTRIC CORP. https://www.kokusai-electric.com/en/ Process for Success Film forming and thermal processes are the most important of the many hundreds of processes involved in forming semiconductors. KOKUSAI ELECTRIC (KE) develops and produces semiconductor manufacturing equipment based on world-class film forming technology which we deliver to the world’s top semiconductor manufacturers. We are supporting the increasingly high functionality and high performance of semiconductors. Our missions in the continuously growing semiconductor market with the leading-edge technology bases on our film forming technology and to be an industry leader in the field of film forming. Products Thin film forming through BCD (Balance Controlled Deposition) Technology. KOKUSAI ELECTRIC’s proprietary BCD technology enables high-quality thin film forming with excellent step coverage and composition ratio control relative to the high aspect ratio. Treatment through new energy sources We have adopted oxidation and film quality improvement technology compatible with high aspect rations and high added value treatment technology through the use of various energies such as light and plasma.
Capabilities and products
- ALD deposition equipment
- BCD (Balance Controlled Deposition) thin film forming technology
- CVD, MOCVD, PECVD and LPCVD deposition equipment
- epitaxy equipment and epi reactors
- film-forming semiconductor manufacturing equipment
- high-step-coverage thin film formation with composition ratio control
- light and plasma energy treatment for semiconductor processes
- oxidation and film quality improvement for high-aspect-ratio structures
- thermal process semiconductor manufacturing equipment