At a glance
| Booth | N0266 |
| Country | TW |
| Website | www.iwakipumps.jp |
Company profile
IWAKI CO.,LTD. provides a variety of pumps for photolithography, developing, stripping, etching, cleaning and CMP tools used in semiconductor manufacturing. The same pump supply extends to manufacturing equipment for LCD and solar-cell production. For facility applications, IWAKI CO.,LTD. provides pumps for DI Water, waste wafer and CMP supply operations. Its facility-related supply also includes pumps used with Chemicals Distribution System operations.
Exhibits
IWAKI CO.,LTD. offers motor-driven metering pumps and electromagnetic metering pumps developed for the quality and performance requirements of a wide range of chemical-dosing applications. A broad set of related accessories is available alongside these metering-pump lines. Its linear pumps use an independently developed ultra-high-efficiency linear drive to provide low-noise, pulsation-free dosing. The linear-pump design is based on ergonomics to improve usability and maintainability, while the compact pump can be used without being tied to a particular working location in laboratory applications. Air-operated diaphragm pumps cover applications from general industry through semiconductor manufacturing and are offered in both metal and resin types. The air-pump range extends from compact OEM models to models capable of handling corrosive gases and high-temperature gases, with uses including gas sampling for analytical instruments and medical applications. Water-treatment controllers range from economical entry models to high-end controllers that can centrally manage multiple sites over the web, supporting lower operating cost and reduced labor. IWAKI CO.,LTD. can also build remote monitoring systems for water-treatment sites. Residual-chlorine measurement is covered by a wide range of meters for different applications, together with integrated automatic chlorine-sterilization equipment and chlorinated-water generation equipment. Tank offerings include impact-resistant and chemical-resistant PE tanks, general-purpose PVC tanks, large-storage tanks and custom tanks matched to specific applications. The broader pump portfolio includes magnetic drive pumps used in surface-treatment, water-treatment, chemical and food-manufacturing processes as well as equipment integration. Maglev pumps combine a magnetic-bearing structure with magnetic drive so the impeller is completely levitated and can operate without contacting surrounding parts. Electromagnetic metering pumps include ultra-compact high-resolution basic types as well as models for high-pressure dosing and water-quality control. Pneumatic bellows pumps are positioned as a high-grade series with semiconductor-manufacturing experience, and the independently developed bellows are designed for long life and reduced downtime. Rotary displacement pumps include chemical gear pumps using fine-ceramic gears as well as rotary and screw pumps that can transfer special liquids such as viscous fluids. Small liquid diaphragm pumps are designed for equipment integration and use an independent method to improve pump efficiency. Additional pump types listed by IWAKI CO.,LTD. include stainless magnetic pumps, sanitary centrifugal pumps, tube pumps, hose pumps, magnetic cascade pumps, high-pressure plunger pumps, liquid-ring vacuum pumps, drum pumps and chemical submersible pumps. Flow and pressure control products include pump-control systems that hold flow or pressure constant and blending systems that mix multiple liquids inline to support energy and labor savings in liquid-transfer processes. Cooling and temperature-control equipment includes circulation and immersion-type temperature-control units, with custom production available for requested specifications. The system-product list also includes small-fish collective tank systems ITS-Z and ITS, immersion denitrification modules, wet compact scrubbers with chemical-dosing equipment, ultraviolet sterilizers and automatic polymer-flocculant dissolution equipment. Other listed systems include pressure-resistance and destructive-test equipment, a hemodynamic simulator, a simulated circulation test system, magnetic filters, square mixers and agitators. For pneumatic drive bellows pumps, IWAKI CO.,LTD. describes an ultra-clean specification with a strong record in semiconductor manufacturing and bellows durability supported by more than 20 years of sales history. All wetted parts in these bellows pumps use fluoroplastic so they can handle semiconductor chemicals including acids, alkalis and excess water. The pump exterior is also coated with fluoroplastic so that no metal part is exposed, while the wetted construction uses chemical-resistant and heat-resistant fluoroplastic to avoid contamination. Pump heads and bellows are welded into an integrated structure to remove concerns about fluid leakage. The FLP pneumatic low-pulsation bellows-pump series has a maximum discharge capacity of 92 L/min, while the FS-N series and FS-100HT2 are each listed at 100 L/min. The FS-H series is listed at 55 L/min, the FW / FW-H series at 80 L/min, and the FF / FF-H and FA series at 40 L/min maximum discharge capacity. The same product family lists SB pneumatic drive dispensers at 100 mL/stroke and CFD chemical replenishing pumps at 8 mL/shot. Accessories for pneumatic drive bellows pumps are available, and related product categories include magnetic drive pumps, motor-driven and electromagnetic metering pumps, rotary displacement pumps, air pumps and reciprocating diaphragm liquid pumps. The SB series pneumatic drive dispenser is designed for semiconductor photoresist application and has a maximum discharge capacity of 100 mL/stroke. The SB series precisely meters and dispenses chemical fluids such as photoresist so the volume per shot can be controlled for the required photoresist amount. An optional suckback function prevents dripping from the injection nozzle, and the bellows has almost no dead volume to minimize the possibility of solution stagnation. A sealless, ultra-slow cylinder design supports low-speed photoresist dosing with less likelihood of trapped air. Wet-end options include stainless SUS304 and fluorine PTFE/PFA materials for different liquids, providing corrosion resistance and contamination-free delivery for high-resolution and high-purity photoresist. The dispenser can be mounted vertically or horizontally except for SB-4K/-5/-6, supporting system configuration in limited installation space. Optional components include a mechanical stopper for fine adjustment of dosing volume and a position detector that confirms correct piston movement in the cylinder. SB series specifications list a maximum discharge-pressure range of 0.05 to 0.1 MPa, a maximum stroke length of 40 mm, supply-air pressure of 0.15 to 0.5 MPa and maximum air consumption of 0.02 to 1.0 NL/stroke. Main materials are listed as SUS304 and PTFE, matching the product's use in chemical-fluid and photoresist delivery.
Capabilities and products
- pneumatic bellows pumps for semiconductor process chemicals
- precision photoresist dispenser
- chemical replenishing metering pump
- motor-driven metering pumps
- electromagnetic metering pumps
- pump supply for semiconductor photolithography/etching/cleaning/CMP