At a glance
| Booth | M0534 |
| Country | TW |
| Website | www.inficon.com/zh-tw/index.html |
Company profile
INFICON Company Limited develops, manufactures and supplies instrumentation, critical sensor technologies and advanced process-control software for semiconductor, vacuum-coating and other industrial applications. Its analysis, measurement and control products serve OEMs and end users involved in complex manufacturing of semiconductors, flat-panel displays, magnetic and optical storage media and precision optics. The company also supplies gas-leak-detection instrumentation to the air-conditioning and refrigeration industries and toxic-chemical analysis instrumentation for emergency-response and security markets. INFICON Company Limited has manufacturing facilities in the United States and Europe and subsidiaries in the United States, China, France, Germany, Japan, Korea, Liechtenstein, Singapore, Switzerland, Taiwan and the United Kingdom. This footprint supports semiconductor process control, sensing, measurement, leak detection and chemical-analysis applications across equipment makers and industrial end users in multiple regions.
Exhibits
Sion™ is a non-invasive, clamp-on RF detector for high-speed arc detection and clean endpoint control, with the stated goals of raising yield and reducing cost of ownership. Sion™ can be retrofitted to existing tool sets and used as a drop-in replacement for OES-based instruments used for endpoint control. Its sensor installation is non-invasive, and Sion™ collects data at 250 kHz for arc detection while integrating data management with FabGuard. For chamber-clean processes, Sion™ is designed to eliminate under-etching and over-etching, which can increase uptime and reduce consumption costs for gases and materials. ADC100 is a non-invasive, high-speed DC arc-detection product for real-time process control and connects to process tools through the FabGuard Sensor Integration and Analysis System. ADC100 collects data at 250 kHz per channel, uses custom cables that connect to most DC generators and applies predefined analysis tools to detect arcs quickly. INFICON’s RF sensing technology is presented for real-time plasma monitoring and wafer etching, with Sion™ providing continuous feedback for endpoint detection intended to avoid over-etching and material waste. The ADC100 is used for arc detection and equipment protection while maintaining production efficiency, complementing Sion™ in plasma and etch process monitoring. Both Sion™ and ADC100 are described as robust RF sensing tools for harsh environments and are intended to support consistent etch quality, workflow reliability and lower downtime. Together, the two RF products combine high-speed data acquisition, non-invasive sensing, endpoint control, arc detection and FabGuard integration for semiconductor process-control workflows. For endpoint control, Sion™ provides continuous process feedback so etching can be stopped at the intended point instead of continuing into over-etch conditions that consume additional material. For DC processes, ADC100 extends the same high-speed monitoring concept to arc events, combining per-channel 250 kHz acquisition with software integration and predefined analysis functions. INFICON positions these RF sensing products as tools for improving process consistency, protecting equipment and keeping production workflows operating with less interruption in demanding plasma environments.
Capabilities and products
- semiconductor process-control software
- gas leak-detection instrumentation
- toxic-chemical analysis instrumentation
- Sion™ non-invasive RF arc detection
- Sion™ endpoint control
- 250 kHz high-speed arc data acquisition
- ADC100 DC arc detection
- FabGuard sensor integration