At a glance
| Booth | K2164 |
| Country | TW |
| Website | www.ics-tech.com.tw |
Company profile
ICS Technology Co., Ltd. was established in March 1997 with capital of 2.7億元, and its factory and office building are located in Zhubei City, Hsinchu County. The company serves semiconductor, photonics, display, and related electronics industries in Taiwan, Southeast Asia, and mainland China through equipment manufacturing, equipment agency business, market development, facility engineering, and after-sales technical support. ICS Technology Co., Ltd. provides manufacturing tools, equipment, measuring instruments, and PM services for the semiconductor industry and also supplies products, materials, and after-sales services for photonics and TFT-LCD industries in Taiwan and China. Its listed product and material lines include iCS Catalytic Waste Gas Abatement Equipment such as GASSMITH GS-080, GS-200, GS-400, and EZM-110; BASF Catalyst; Solvaysolexis Fomblin and Galden PFPE; AmProfilm SLR Film; Hirota SSD Evaluation Tool; and UNIC display-related and semiconductor-related equipment. The company also provides absorbent refill services, facility piping engineering, dispersion head cleaning services, and testing services in Class 10 and Class 1000 clean-room facilities. ICS Technology Co., Ltd. has its own manufacturing factory and production line for gas-abatement systems in dry-scrubber, wet, thermal-wet, and burn types, together with Class 10 and Class 1000 clean rooms for equipment demonstration and testing. Its self-developed adsorption-type waste-gas treatment equipment is used in semiconductor, photonics, panel, LED, and solar industries for toxic gases such as arsine and phosphine and other waste gases, with stated treatment efficiency above 99%, and customized waste-gas treatment equipment is available for different customer requirements. The company states that it exclusively represents Solvay vacuum oils and refrigerants, maintains offices in Taipei, Hsinchu, Tainan, and Shanghai for customer service, and has been recognized by customers including Micron, UMC, and VIS. In 2004, ICS Technology Co., Ltd. obtained certificates for an ISO09001 quality-system certification and an ISO14001 environmental-management-system verification.
Exhibits
Dry adsorption equipment is offered for toxic gases including AsH3, PH3, and BF3, with stated treatment efficiency above 99%, room-temperature operation, and no wastewater generation. Available configurations include a system with two 200L absorbent drums for non-stop operation, a system with one 200L drum, a simplified facility-side system with one 100L drum, and facility-side systems with one 80L or one 40L drum. The GS080 and GS040 are dry adsorption systems for toxic-gas treatment; GS080 uses an 80L adsorption drum and GS-040 uses a 40L adsorption drum, and the product page states an adsorption rate of 99.95% with MTBF>2000hr and MTTR<2.5hr. GS080/GS040 features include PLC integration with gas detectors and other control components, a combined PLC and touch-panel design, support for small-flow diverse gases, and a compact footprint for smaller installation spaces. Available options include a blower, a color-change viewing window, remote monitoring, and a motor monitoring system. The GS080/GS040 page lists process gases and vapors including AsH₃, PH₃, BF₃, SiH₄, GeH₄, DCS, TCS, Cl, HCl, HF, F₂, NH₃, TDMAT, BCl₃, WF₆, TEO5, SiF₆, NO, CO, H₂S, TMGa, TMIn, TMAI, IPA, acetic acid, alcohols, and organic acids. Hardware requirements listed for GS080/GS040 include DN40 KF gas inlet and outlet flanges, Main Power at 208V/60Hz 3Φr15amps, and N2 through Swagolok 1/4" at 85-115psi. Both GS-040 and GS-080 are listed at 420 mm wide, 700 mm deep, and 650 mm high; GS-040 uses a 40(L) S040LA adsorption drum with 360 mm diameter, while GS-080 uses an 80(L) S080LA adsorption drum with 420 mm diameter. Beyond these dry adsorption systems, ICS Technology Co., Ltd. supplies catalytic waste-gas abatement equipment, facility piping engineering, absorbent refills, dispersion head cleaning, PM services, and Class 10/Class 1000 clean-room testing support for semiconductor and related manufacturing environments.
Capabilities and products
- semiconductor manufacturing tools and measuring instruments supply
- semiconductor PM services
- catalytic waste-gas abatement equipment
- dry adsorption toxic-gas treatment equipment
- facility piping engineering
- absorbent refill services
- dispersion head cleaning services
- Class 10/1000 clean-room testing services
- vacuum oil agency (Solvay)
- refrigerant agency (Solvay)
- BASF Catalyst supply
- Fomblin/Galden PFPE supply