Heidelberg Instruments Mikrotechnik GmbH

Exhibitor at SEMICON Taiwan 2026 · Booth R7724

Booth R7724Country DE2 product topics
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BoothR7724
CountryDE
Websiteheidelberg-instruments.com
Exhibitor profile

Company profile

Founded in 1984, Heidelberg Instruments is a global leader in the design, development, and production of high-precision laser lithography systems, maskless aligners, and nanofabrication tools. The company has established itself as a trusted partner and solution provider for both industry and academia, with more than 1,500 systems installed worldwide and over 40 years of expertise in advanced lithography and direct-write technologies for micro- and nanofabrication. The portfolio ranges from compact, tabletop systems for R&D and small-series production to advanced photomask manufacturing equipment for high-volume production. Our solutions enable a broad spectrum of micro- and nanoscale patterning applications, supporting both high-resolution 2D structuring and the creation of complex 2.5D topographies through grayscale lithography. By combining precision, flexibility, and automation, Heidelberg Instruments helps customers accelerate innovation while reducing development costs and time-to-market. Typical application areas include photonics, electronics and sensors, semiconductors and advanced packaging, displays, quantum devices, MEMS, microfluidics, 2D materials, and photomask production. Empowering Semiconductor Innovation: Heidelberg Instruments’ precise lithography tools support semiconductor manufacturing and research by addressing critical lithography processes across development and production. The industrial maskless aligner systems can be fully integrated into modern machine execution systems including SECS/GEM with GEM300 support as well as OPC/UA. These capabilities enable high-precision reticle fabrication, maskless exposure, adaptive patterning, and alignment for multilayer devices and advanced packaging. Today, Heidelberg Instruments employs approx. 400 people worldwide and is headquartered in Germany, with subsidiaries in Japan, Korea, and the United States. The company operates Process and Application Labs in Germany, Switzerland, and China and is part of the LAB14 Group. In the Chinese and Taiwanese markets, Heidelberg Instruments is represented exclusively by Stella Technology Co., Ltd. Stella Technology will be exhibiting at Booth K2382 .

Exhibitor profile

Exhibits

Products include high-precision laser lithography systems, maskless aligners, nanofabrication tools, and equipment ranging from tabletop R&D/small-series systems to advanced photomask-manufacturing systems for high-volume production. The systems support high-resolution 2D structuring, grayscale-lithography 2.5D topographies, high-precision reticle fabrication, maskless exposure, adaptive patterning, and alignment for multilayer devices and advanced packaging.

Exhibitor profile

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