At a glance
| Booth | N0043 |
| Country | CN |
| Website | www.istar-group.com |
Company profile
Guangdong iStar Technology Equipment Co., Ltd. is a private group company formed by integrating capital resources, mature industry experience, and an extensive technology foundation with a mission of developing high-end manufacturing equipment and bringing that equipment into industrial application. The company develops innovative equipment for semiconductor, pan-semiconductor, precision-manufacturing, new-energy, and biomedical fields, giving its equipment-development activity a multi-industry scope. Its core technologies are precision machinery, precision optoelectronics, precision motion, precision control, and complex software, combining mechanical, optical, motion, control, and software capabilities within the same equipment-development platform. A growing core technical team and continuing technology development support a defined technology and product roadmap for supplying advanced and cost-effective machines to the market.
Exhibits
The equipment portfolio includes large-field scanning exposure and nanoimprint lithography systems used for precision pattern manufacturing. Within its product and service structure, iStar lists lithography-system solutions, bonding-system solutions, metrology and optical-system solutions, and AeroLas air-bearing and system offerings. The iAS Series large-area lithography machine supports exposure of wafers in multiple sizes as well as large-size substrates. For those exposure applications, the iAS Series combines the lower-cost advantages associated with contact or proximity exposure with the high-resolution performance associated with stepper-type equipment. That combination is intended to meet large-area exposure requirements in advanced packaging, connecting the exposure platform directly with semiconductor packaging processes that require large patterned areas. The iNS Series step-and-repeat nanoimprint equipment provides fully automated operation rather than relying on manual handling through the complete process flow. Its automated functions integrate autofocus and alignment so that positioning and focusing can be completed within the equipment sequence. The same integrated sequence includes adhesive spraying, imprinting, and UV curing, combining material application, imprint formation, and curing in one automated process. Defect inspection is also integrated into the automated process, so autofocus, alignment, adhesive spraying, imprinting, UV curing, and inspection can proceed without manual intervention. By removing manual intervention from the complete process flow, the iNS automation is described as substantially increasing equipment throughput. The lithography-system product page names the iAS Series large-area lithography machine and the iNS Series step-and-repeat nanoimprint equipment as the two principal series shown for precision-pattern manufacturing. The two named series address different patterning approaches: iAS focuses on large-area exposure for wafers and substrates, while iNS combines nanoimprint processing with a fully automated integrated sequence.
Capabilities and products
- large-field scanning exposure equipment
- fully automated step-and-repeat nanoimprint equipment