At a glance
| Booth | R7812 |
| Country | TW |
| Website | www.greenfiltec.com |
Company profile
GreenFILTEC LTD. provides AMC prevention and control programs for semiconductor and panel industries and develops micro-pollution control techniques for those production environments. The company states that its filter frames can be reused and have received a Certificate for the use of Type II Green Mark from the Government of Taiwan. Through modular product design, GreenFILTEC targets three 3R objectives: filter-waste reduction, frame reuse, and filter-regeneration reuse, with the stated purpose of reducing overall filter acquisition cost. Its current customer base includes global wafer foundries, panel makers, and DRAM manufacturers. Within that customer base, supply for 12-inch advanced processes is described as a staple business area, and the company identifies supplying consumables for key semiconductor advanced processes as a development motivation. GreenFILTEC combines filter products with an air-filter analysis laboratory team that performs cleanroom environmental sampling, filter-performance testing, saturation-capacity analysis, and related AMC analysis work. The company's service model extends from on-site survey and inspection through sample analysis, solution planning, product production, product sales, and customer-opinion consultation. For AMC concentration control and solution recommendations, GreenFILTEC uses customer-provided information together with on-site sampling and laboratory analysis to provide one-stop problem-solving support.
Exhibits
GreenFILTEC LTD. has developed regenerated chemical filters using a patented modular frame design in which the aluminum frame is reused and only the internal adsorbent material needs to be replaced. When a filter reaches the end of its service life, the aluminum frame can be reused after professional cleaning and performance inspection, making those two steps part of the stated regeneration process. The regenerated-filter formulation can be optimized for specific process gases and the filter can operate stably in fan filter units, or FFU, while supporting semiconductor cleanliness requirements. For high-load conditions in thin-film and cleaning processes, where isopropyl alcohol (IPA) and Acetone can significantly affect filter life, the adsorption formulation is adjusted to delay media saturation and improve overall use efficiency. After precise formulation adjustment, the regenerated media is stated to have adsorption-kinetics performance comparable to disposable filters and to operate stably in FFU installations. The company states that this regenerated-filter service can maintain 3nm-class cleanliness while reducing Scope 3 carbon footprint and turning semiconductor chemical filters from consumables into reusable assets. Reuse of the high-strength aluminum-alloy frame is stated to reduce more than 60% of metal waste, and the modular approach is also intended to lower waste-handling costs at the facility side. Each regenerated filter undergoes laboratory testing under an ISO9001 quality system so that initial filtration efficiency and pressure-drop indicators meet international specifications. The listed regenerated-filter specification uses activated carbon, a recommended airflow of 500-1000 CMH, pressure drop below 35±15% at 1000CMH, initial removal efficiency above 90%, and a weight of 6 Kg per piece. The same specification places the filter in an FFU, identifies isopropyl alcohol and acetone as removal targets, uses an aluminum frame, and lists dimensions of 800 × 485 × 63.5 mm. Compared with the traditional three-in-one filter format described by the company, the modular filter is PU free, is stated to save 3 to 5% in cost, and is described as having No Outgassing. Its modular construction allows a single filter-media layer to be replaced without removing and discarding the entire filter, while the reusable frame is stated to support more than 40% purchase-cost savings through repeated use and more than 60% waste reduction. For spare inventory, the modular approach requires purchasing filter media while continuing to use the frame until it is worn, rather than stocking a complete replacement filter for every change cycle. AMC laboratory testing includes molecular acids (MA), molecular bases (MB), and condensables (MC), in addition to cleanroom environmental sampling, filter-performance analysis, and saturation-capacity analysis. GreenFILTEC also provides material outgassing analysis for various materials because impurities released from materials can affect product stability, application reliability, and downstream manufacturing equipment in precision-process environments. For regenerated-filter performance, the company states that formulation re-optimization can strengthen adsorption for specific AMC pollutants while maintaining disposable-filter specification requirements, and that filters are tested for pressure drop and removal efficiency before shipment. The stated ESG effects include reducing solid waste because only exhausted adsorbent material is discarded during replacement cycles and reducing carbon impact by repeatedly using the aluminum frame instead of producing a new frame for every cycle. Under normal operation and maintenance conditions, the patented aluminum-alloy frame is stated to be reusable for more than 10 cycles, with frame integrity and sealing inspected on each return before the next regeneration filling. No FFU setting change is required for replacement because the regenerated filter is designed so that its dimensions and physical airflow resistance match the traditional complete filter, allowing standard maintenance procedures without retuning FFU speed or air-handling parameters. The current regeneration process is described as designed and verified for organic compounds, or VOCs, used in common semiconductor AMC control scenarios, while acid gases and other pollutant types are handled as separate product-line planning. Because GreenFILTEC states that it has complete independent design and production capability, filter-media specifications can be customized using actual fab monitoring data and process requirements, and the separated frame-and-media structure allows only the media to be changed when process conditions change.
Capabilities and products
- AMC control solutions for semiconductor and display industries
- regenerated semiconductor chemical filters
- modular aluminum-frame filter regeneration service
- IPA/Acetone adsorption formulation optimization
- cleanroom environmental sampling and AMC analysis
- filter performance testing
- filter saturation-capacity analysis
- molecular acid/base/condensable detection
- one-stop AMC concentration-control service
- material outgassing analysis
- custom AMC filter-media specification design