At a glance
| Booth | T9225 |
| Country | TW |
| Website | www.fstintl.com.tw |
Company profile
FST International H.C., Ltd. supplies semiconductor and related electronics businesses with CMP process monitoring for particle size, zeta potential, and H2O2 concentration, and states that most major fabs have its systems. Its CMP monitoring portfolio names Entegris Accusizers A9000AD(FX Nano), A7000AD, A7000SIS, A7000APS, and Nicomp N3000 / Z3000 for particle-related measurement. For chemistry control in CMP, the company also lists the Entegris SemiChem APM 200 series on-line titrator and Xigo Nanotools Acorn Flow for measuring dispersion quality and stability. For AMC and FOUP environment control, FST uses Proton Transfer Reaction mass spectrometry and ion-mobility approaches, with Ionicon Analytik PTR-TOFMS TOF 1000, TOF8000, QiTOF and IUT Technologies IMS and GC-IMS among the named systems. Its gas and chemical trace-contamination measurement range includes Thermo Fisher Scientific APIX, Bartec 5673 for moisture and oxygen, and CIC Photonics FT-IR for specialty-gas quality control.
Exhibits
CUBE-II is a high-resolution benchtop scanning electron microscope with a compact footprint and high-performance imaging capability for materials science, electronics, life sciences, and educational laboratories. Its motorized five-axis stage supports X / Y / Z / Tilt / Rotate and provides 360-degree flexible viewing angles, while magnification spans 20× to 200,000× for micro- and nanoscale detail. The CUBE-II specification set includes 3.0 nm resolution at 30 kV, a maximum sample size of Ø 70 mm, accelerating voltage from 1 to 30 kV, and High / Low vacuum modes. Auto Focus and Auto Exposure support automated operation, and the low-vacuum coating-free mode is intended for observation of non-conductive samples without conductive coating. Integrated image-processing software supports fast image acquisition, and a 15.6-inch touch screen provides one-touch switching of modes and magnification. Application examples include powders, fibers, and metallic microstructures in materials science; PCBs, semiconductors, and micro-solder joints in electronic-component inspection; insects, plant tissues, and microbial morphology in life sciences; and teaching demonstrations and fundamental materials observation in education and research. Beyond SEM, FST's material-analysis range includes color and foreign-particle analyzers, particle-size analyzers, BET surface-area measurement, density analyzers, elemental analysis, and thermal-analysis instruments including DIL, TMA, TGA, DSC, and STA. The product range also includes thermal-conductivity measurement, thermoelectric-characteristic measurement, gas and liquid environmental analysis, process monitoring, bead mills, NGK high-temperature process furnaces, and various materials including in-house R&D and newly developed materials. Application areas named for these analytical and process products include metals and alloys, polymers, research and academia, glass and ceramics, chemicals, energy, hydrogen technologies, life sciences, nuclear applications, semiconductors and electronics, thin-film technology, cosmetics, pharmaceuticals and food, construction materials, automotive, aerospace, and space applications. Measurement services cover thermal analysis, thermal conductivity, SEM measurement, particle-size analysis, grinding-mill measurement, specific-surface-area measurement, and true-density analysis.
Capabilities and products
- supply of CMP particle-size monitoring equipment
- supply of CMP zeta-potential monitoring equipment
- supply of CMP H2O2 concentration monitoring equipment
- supply of online titrators for CMP
- supply of dispersion quality and stability measurement equipment
- AMC and FOUP environmental monitoring by PTR mass spectrometry
- supply of gas and chemical trace-contamination measurement equipment
- supply of high-resolution benchtop SEM systems
- supply of BET surface-area measurement equipment
- supply of thermal analysis instruments
- thermal conductivity and thermoelectric measurement
- SEM measurement services
- particle-size analysis services
- specific-surface-area measurement services
- true-density analysis services