At a glance
| Booth | T9225 |
| Country | TW |
| Product categories | Chromatograph · Instruments; Bench Top Test · Process Monitoring systems · Chemical; Pure Water; Fluid Monitoring & Control Systems · Environmental; Utility Systems & Monitoring · Gas Monitoring Equipment; RGA's; TGO compliance · Process Controls · Waste Control; Effluent Management Systems (Fluid & Gas; Exhaust Conditioning; Scrubbers) · Contamination Control; HEPA Filtering Systems · Sales; Manufacturers Representation or Distributors |
| Website | www.fstintl.com.tw |
Company profile
FST International H.C., Ltd. has following products for semiconductor and related electronic businesses 1. CMP Process Monitor including particle size, zeta potential, and H2O2 concentration. Most of major fabs have our systems: Major Brands and Models: •Entegris (Accusizers): A9000AD(FX Nano),A7000AD, A7000SIS,A7000APS, Nicomp N3000 / Z3000 •Entegris (On-line titrator): SemiChem APM 200 series. •Xigo Nanotools: Acorn Flow to measure dispersion quality and stability. 2. AMC & FOUP Environment Control based on Proton Transfer Reaction (PTR) Mass Spectrometer and Ion Mobility Major Brands and Models: •Ionicon Analytik: PTR-TOFMS TOF 1000, TOF8000, QiTOF •IUT Technologies: IMS, GC-IMS 3. Gas and chemical trace contamination measurements: Major Brands and Models: •Thermo Fisher Scientific: APIX •Bartec: 5673 for moisture and oxygen •CIC Photonics: FT-IR for specialty gas QC
Capabilities and products
- AMC and FOUP environment control using PTR mass spectrometry and ion mobility
- CIC Photonics FT-IR for specialty gas QC
- CMP process monitoring for particle size, zeta potential and H2O2 concentration
- Entegris Accusizers A9000AD(FX Nano) and A7000AD CMP monitors
- Ionicon PTR-TOFMS TOF 1000, TOF8000 and QiTOF systems
- Xigo Acorn Flow dispersion quality and stability measurement