At a glance
| Booth | J2353 |
| Country | US |
| Website | www.icpms.com/products/scoutdx.php |
Company profile
Elemental Scientific, Inc. develops and produces a full range of automated sample-introduction systems for determining trace-element concentrations in a wide range of samples by ICPMS, ICPOES and FAA. Its product line ranges from nebulizers to intelligent autosamplers with inline automatic dilution for autocalibration, sample dilution and QC dilutions. Advanced systems can also perform inline chemistry including preconcentration, matrix removal and speciation, eliminating manual sample preparation and improving productivity and efficiency.
Exhibits
Accurate ICPMS determination of trace elements in urine, whole blood, blood plasma, serum and other complex biological matrices can be hindered by matrix effects from high total dissolved solids and other biological components. Traditional matrix-matching calibration with actual clinical samples such as pooled urine or whole blood has been used for the best accuracy, but it requires collection, handling and characterization of large volumes of potentially hazardous biological material and a separate calibration matrix for each clinical sample type. Because elements of interest are likely to be present in the calibration matrix, blank correction is necessary to achieve accurate results. Clinical Matrix is an ultrapure proprietary synthetic mixture designed to mimic biological matrices for matrix matching of urine, whole blood, blood plasma, serum, and digested hair and nails; it is specially purified to remove metal contamination and has low or sub-ppt trace-metal concentrations for most elements on the periodic table. The prep FAST IC Clinical system can add the SampleSense UHT Clinical configuration and operate in three modes: total metals with inline dilution, speciation with inline dilution, and high-throughput analysis of manually prepared samples using the UHT addition, serving customers that need both high-throughput biological analysis and elemental speciation. scoutDX provides real-time 24/7 monitoring of semiconductor process chemicals and ultrapure water, including metal-impurity monitoring at delivery by tanker or drums, central chemical supply, distribution points and final point of use to verify low or sub-ppt contamination levels. scoutDX supports autocalibration of metals, analysis of all semiconductor-grade chemicals, up to 40 sampling points, sampling distances up to and greater than 300 m in any direction, fully automated ppt and sub-ppt metal detection, non-contamination of samples, minimal human contact with chemicals, and flexible data reporting including SECS-GEM. The broader Scout Semiconductor Online Monitoring Systems cover fab-wide real-time monitoring of ppt-level metals, nanoparticles and organic contaminants in semiconductor process chemicals and ultrapure water. Scout online metals monitoring uses automated 24/7 tools for ultrapure semiconductor chemical analysis and detects ultra-low levels of metallic and particulate contaminants across chemicals. The VPD-ICPMS offering is a high-throughput, fully automated production tool for online monitoring of metal contamination on semiconductor wafers with ultra-low detection limits; Radian combines a single process-station design, ultrafast scanner and integrated ICPMS that make it the fastest, most automated VPD-ICPMS in the world, while Radian 3 uses one all-in-one process module, Radian 7 uses dual all-in-one process modules, and the radial fast-scanning nozzle scans a wafer surface in 60 seconds or less. Fully automated organic-contaminant systems monitor organic impurities in semiconductor chemicals in real time, automatically detect and identify contaminants, quantify and chart each contaminant, and send SECS-GEM alerts for near-real-time monitoring. Online nanoparticle and total-metals monitoring provides multi-element determination of nanoparticle size and quantity, autocalibration of nanoparticles and total metals, analysis of all semiconductor-grade chemicals, up to 40 sampling points and distances up to 300 m in any direction. The fully automated PPQ total-metals platform provides sub-PPQ detection limits for UPW, IPA, TMAH, 30% H2O2 and other matrices, performs multi-element total-metals determination, removes difficult matrices and reduces the impact of ICPMS interference. Organic-contaminant monitoring supports up to 40 sample points, rapidly transfers discrete samples up to 300 m to a central unit, detects organic contamination and impurities in facility chemicals, environmental effluents, chemical baths and other liquid samples, and simultaneously monitors the full range of semiconductor chemicals. scoutLAB is a laboratory-based online system for 24/7 metal monitoring with direct connection to chemical supply, capacity for up to 20 direct chemical samplers and an onboard autosampler option for laboratory analysis. Real-time ultra-trace metal monitoring provides immediate detection and notification of metal contamination, supports improved product yield, reduces human contact with hazardous chemical samples to improve safety and reduce errors, and offers customizable software with user-defined contamination-control parameters at every sampling station. For silicon nitride etching, the systems provide fully automated unattended measurement of ppm-level free silicon with simultaneous bound-silicon monitoring, monitor free and bound silicon in hot phosphoric baths, and perform autocalibration and verification of silicon in those baths. Fully automated online process-gas monitoring provides automated monitoring with immediate contamination detection and notification, simultaneous nanoparticle and total-metals data, up to 16 process-gas connections, and monitoring of CO2, N2, O2, Ar, He, Ne and other gases. Total organic carbon online monitoring provides quantitative TOC analysis in UPW and wastewater over a range below 0.2 to 1000 ppm C, with a single central analyzer supporting up to 40 sampling points and distances up to 300 m in any direction.
Capabilities and products
- automated sample-introduction systems for ICPMS/ICPOES/FAA
- autosamplers with inline automatic dilution
- inline preconcentration, matrix removal and speciation
- ICPMS matrix-matching material for clinical biological samples
- 24/7 online metals monitoring for semiconductor chemicals
- online VPD-ICPMS monitoring of wafer metal contamination
- real-time organic-contaminant monitoring in semiconductor chemicals
- online nanoparticle and total-metals monitoring
- sub-PPQ total-metals analysis for UPW/IPA/TMAH/H2O2
- automated free/bound silicon monitoring in hot phosphoric baths
- process-gas nanoparticle and total-metals monitoring
- online TOC monitoring for UPW and wastewater