At a glance
| Booth | P6200 |
| Country | US |
| Website | www.ekksc.com |
Company profile
O-Ring Products – EKK Eagle America Inc. Semicon Division. EEAI Semicon Division Offers Complete Range of Semiconductor Materials for Comparative Temperature and Chemical Resistance Levels. Superior 486 is specifically designed to be a cost-effective, high-performance material for semiconductor applications. Superior 486 offers excellent plasma resistance and low particulation in a wide range of plasma environments. See EEAI Semicon Division Material Matrix for more details. Superior 495 is a cost-effective, high performance compound for applications in wet chemistries. Superior 495 offers excellent acid resistance and low extractables. Superior 485 is specifically designed to be a cost-effective, high-performance material for semiconductor applications. Superior 485 offers excellent plasma resistance and low particulation in a wide range of plasma environments. Superior® 301F was specifically developed as extremely clean unfilled perfluoroelastomer (FFKM) with excellent plasma resistance, minimal particulation and unrivaled compression set. This combination of properties allows Superior® 301F to be an excellent match for a wide range of CVD, Etch, metallization processes. It also has excellent chemical compatibility in a wide range of industrial applications. Superior® FC605 is newly developed High Temperature resistant high-performance perfluoroelastomer (FFKM). Specifically designed for thermal processes with sealing locations up to 300°C and maximum excursion temperature to 340°C, while providing low outgassing and compression set. Superior® FC605 is an excellent match for Diffusion and Lamp Anneal along with excellent chemical compatibility in a wide range of industrial applications.
Capabilities and products
- O-ring products for semiconductor applications
- Superior 301F FFKM for CVD, Etch and metallization processes
- Superior 485 plasma-resistant semiconductor sealing material
- Superior 486 plasma-resistant semiconductor sealing material
- Superior 495 acid-resistant wet-chemistry sealing compound
- Superior FC605 high-temperature FFKM seals for up to 300°C locations
- Superior FC605 seals for diffusion and lamp anneal processes