At a glance
| Booth | I2015, R7324 |
| Country | FR |
| Website | ecm-greentech.fr |
Company profile
ECM Greentech has been present in the semiconductor market since 1986 and describes extensive experience in engineering and manufacturing mass-production and laboratory furnaces for atmospheric and reduced-pressure processing, together with wafer transport automation and software control. Its semiconductor process competence covers diffusion, oxidation, LPCVD, and PECVD, with applications including LYDOP POCL3 and BCl3 diffusion, LYTOX wet and dry oxidation, anneal, silicon nitride, silicon oxinitride, poly silicon, and TEOS. To scale work from laboratory research and development to pilot line and volume manufacturing, ECM Greentech proposes the MINILAB platform as an offsite process-development and qualification tool covering the named semiconductor applications. Its electrostatic chucks use proprietary ESC capacitive technology for clamping and processing thin and ultra-thin wafers, and the company states that electrostatic chucks and heating pedestals have been designed and manufactured for wafer processing since 1992. ECM Greentech supplies OEMs, semiconductor fabs, foundries, and laboratories worldwide with wafer-handling components supplied as original equipment or retrofit, while global support is managed through subsidiaries and service centers. ECM Components is identified as a sister company of ECM Greentech and supplies Flowlink gas components for the distribution of pure and corrosive gases, including bellows valves, diaphragm valves, control valves, complex valve manifolds, check valves, filters, and accessories. ECM Components also designs gas panels and offers Kemstream Direct Liquid Injection vaporizers for CVD, MOCVD, PECVD, ALD, PEALD, ALE, and other gas-phase processes. Kemstream Vapbox DLI vaporizers are described as capable of vaporizing a broad spectrum of organic and organometallic precursors at atmospheric pressure or under vacuum. Beyond semiconductor process equipment, ECM Greentech describes itself as a brand belonging to the ECM Group and combines semiconductor, renewable-energy, and crystal-growth activities within a broader industrial equipment business. The company emphasizes research and development and states that it has a privileged partnership with CEA-INES, the National Institute of Solar Energy in France, while continuing technical improvement in key equipment areas.
Exhibits
ECM Greentech offers turnkey solutions and equipment for semiconductors, renewable energy, and crystal growth, including photovoltaic equipment and turnkey lines from ingot growth through solar-cell manufacturing as well as equipment for storage applications. Its semiconductor equipment range includes Si and SiC wafer-processing systems and equipment for SiC ingot growth, while crystal-growth equipment for sapphire, silicon, and silicon carbide is identified as a core business offering. The renewable-energy portfolio includes PV production equipment and platforms listed as PV1300, PV600, PV80, PV20, SOLARLAB, TUBESTAR PV, and CrystalMax. Crystal-growth equipment families listed by ECM Greentech include CZOCHRALSKI PULLER, KYROPOULOS, PVT FURNACE, BRIDGMAN, MIRROR FURNACE 2400, MIRROR FURNACE 3000, LHPG, EFG, TETRA ARC, VERTICAL LPE, and MPD. The semiconductor wafer-processing furnace range includes DF SERIES, VAR SERIES, TUBESTAR, MEMSLAB PECVD, VS SERIES, ACTISTAR, OXISTAR, and CLOSE SPACE SUBLIMATION. Named development projects include EFFISIENT, a Czochralski puller for silicon crystallization supported by France 2030, and SEPO 450, a high-capacity furnace for growing large-diameter sapphire crystals developed alongside CNRS, SOMOS, ALTIMET, and Université de Lyon with France 2030 support. PV ENLIGHT is described as equipment and process development targeting 25% efficiency with TOPCon solar-cell technology alongside CEA-INES and CARBON, while EPOBOC is a Poly-Si passivating-contact bottom cell for Perovskite/Silicon tandem devices developed alongside Fraunhofer. The project list also includes development of a PVT furnace for SiC crystal growth and FASTLANE, identified as the winner of a European call on SiC wafer treatment alongside CEA, IBS, SOITEC, and other participants. For large projects, ECM Greentech states that its project-management expertise is applied to photovoltaic production lines up to GW scale, covering activities from silicon purification to PV systems and including technology transfer and training. The combination of turnkey engineering, wafer-processing systems, SiC ingot growth, crystal-growth furnaces, semiconductor process furnaces, and project-specific research programs gives the company an equipment scope spanning laboratory development, industrial production, and full production-line implementation.
Capabilities and products
- atmospheric and reduced-pressure process furnaces
- wafer transport automation and software control
- diffusion process equipment
- oxidation process equipment
- LPCVD process equipment
- PECVD process equipment
- MINILAB process-development and qualification platform
- electrostatic chucks for thin and ultra-thin wafers
- wafer heating pedestals
- wafer-handling components for original equipment and retrofit
- Si and SiC wafer-processing systems
- SiC ingot-growth equipment
- sapphire crystal-growth equipment
- silicon crystal-growth equipment
- SiC crystal-growth equipment
- photovoltaic turnkey lines from ingot growth to solar-cell manufacturing