At a glance
| Booth | I2015 |
| Country | FR |
| Product categories | Crystal Growing & Machining Equipment · Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD · Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment · Chucks for Wafer and other Substrates · Assembly · Automation & Robotics · Equipment; Hardware; Product Design, Integration and Manufacturing · Manufacturing Process Support and Development · Test Services or Consulting |
| Website | ecm-greentech.fr |
Company profile
ECM Greentech SEMCO is present in the semiconductor market since 1986 and has extensive experience in engineering and manufacturing of mass-production and labortory furnaces for atmospheric and reduced-pressure processing as well as wafer transport automation and software control. The company's field of competence covers diffusion, oxidation, LPCVD and PECVD. Typiocal applications include LYDOP POCL3 and BCl3 Diffusion, LYTOX Wet and Dry Oxidation, Anneal, Silicon Nitride, Silicon Oxinitride, Poly Silicon and TEOS. To address the challenges attached to scaling from lab scale R&D to pilot line and volume manufacturing, SEMCO ECM proposes the MINILAB platform, an offsite process development and qualification tool covering the complete range of above-named applications. SEMCO's Electrostatic Chucks offers smart solutions for clamping and processing of thin and ultra-thin wafers based on its proprietary ESC capacitive technology. SEMCO has been designing and manufacturing electrostatic chucks (ESC) and heating pedestals to the wafer processing industry since 1992. SEMCO ECM provides leading OEMs, Semiconductor Fabs, foundries and laboratories worldwide with innovative and efficient wafer handling components as original equipment or retrofit. The company actively manages global support through our subsidiaries and service centers. ECM Components, sister Company of ECM Greentech, offers a complete range of gas components (Flowlink brand) dedicated to the distribution of pure and corrosive gases, including: bellows valves and diaphragm valves, control valves, complex valves manifolds, check valves, filters and accessories. ECM Components also designs gas panels and offers Kemstream's Direct Liquid Injection (DLI) vaporizers for CVD, MOCVD, PECVD, ALD, PEALD, ALE, and all gas-phase processes. Kemstream Vapbox DLI vaporizers are capable of vaporizing a broad spectrum of organic and organometallic precursors, either at atmospheric pressure or under vacuum.
Capabilities and products
- Flowlink gas components for pure and corrosive gases
- Kemstream Direct Liquid Injection (DLI) vaporizers for CVD, MOCVD, PECVD, ALD, PEALD and ALE
- LYDOP POCL3 and BCl3 diffusion
- LYTOX wet and dry oxidation
- MINILAB offsite process development and qualification platform
- anneal, silicon nitride, silicon oxynitride, polysilicon and TEOS applications
- diffusion, oxidation, LPCVD and PECVD processing
- electrostatic chucks (ESC) for thin and ultra-thin wafers
- heating pedestals for wafer processing
- mass-production and laboratory furnaces for atmospheric and reduced-pressure processing
Related product topics
- Direct Liquid Injection Vaporizers for Thin-Film Deposition
- Prototype-To-Volume Process Development
- MEMS and LED Specialty Wafer Processing
- Flow-Control Components and MFCs
- Process Gas Handling Equipment
- Electrostatic Chucks
- Thermal-Process Furnaces and Ovens
- Diffusion and RTA Thermal Processing
- Oxidation And Diffusion Furnaces
- High-Temperature Furnace Chambers
- Wet and Dry Oxidation Systems