At a glance
| Booth | H0011 |
| Country | US |
| Product categories | Heating; Annealing; Curing Equipment - Furnaces; Conveyors; Ovens; Test Chambers; Heat Treating · Repair; Rework Equipment · Crystal Growing & Machining Equipment · Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD · Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment · Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment · Heating elements; coils; insulation; vestibule blocks and other Furnace components |
| Website | www.dsfibertech.com |
Company profile
We are a recognized leader in the design and manufacture of Diffusion Furnace Chambers for wafer fabrication. Our offerings of standard gauge chambers, from 400 degC - 1350 degC; Low Mass/Fast Ramp Chambers temperature ranges from 200 degC - 1250 degC Speciality chmabers to 1750 degC are available. We also provide Direct Replacement Horizontal and Vertical heaters for / Kokusai / ASM / Aviza / SVG Thermco, as well as Torch elements, Vestibule Blocks and Soft Collars. We can provide a refurbishment service on select vertical elements at a greatly reduced cost as well.
Exhibits
DS Fibertech Corporation, an ISO 9001:2015 certified, semiconductor diffusion heater and custom high temperature furnace chamber manufacturer We are an industry leading manufacturer of custom heater elements, high and low temp furnace chambers, semiconductor diffusion heaters, ceramic vacuum formed heaters and insulation shapes, SOFC test heaters, and laboratory furnaces. DS Fibertech Corporation offers excellent customer service and competitive lead times to support customer needs.
Capabilities and products
- Low Mass/Fast Ramp Chambers from 200 degC to 1250 degC
- ceramic vacuum formed heaters and insulation shapes
- diffusion furnace chambers for wafer fabrication
- direct replacement horizontal and vertical heaters
- replacement heaters for Kokusai, ASM, Aviza and SVG Thermco
- semiconductor diffusion heaters
- specialty furnace chambers to 1750 degC
- standard gauge furnace chambers from 400 degC to 1350 degC
- torch elements, vestibule blocks and soft collars
- vertical element refurbishment