At a glance
| Booth | H0011 |
| Country | US |
| Website | www.dsfibertech.com |
Company profile
DS Fibertech Corporation designs and manufactures Diffusion Furnace Chambers for wafer fabrication. Its standard-gauge furnace chambers cover temperatures from 400 degC to 1350 degC. Low Mass/Fast Ramp Chambers cover a temperature range from 200 degC to 1250 degC, while specialty chambers are available to 1750 degC. The company provides direct-replacement horizontal and vertical heaters for Kokusai, ASM, Aviza, and SVG Thermco equipment. Related furnace parts include Torch elements, Vestibule Blocks, and Soft Collars. For selected vertical elements, DS Fibertech Corporation also provides refurbishment service as an alternative to replacement. DS Fibertech Corporation manufactures semiconductor diffusion heaters and custom high-temperature furnace chambers. Customer service and competitive lead times are part of the company’s approach to supporting customer requirements. The diffusion-furnace-chamber work is explicitly tied to wafer fabrication, while the direct-replacement heater range covers both horizontal and vertical configurations. Its refurbishment service applies to selected vertical elements and is presented as a lower-cost service option.
Exhibits
The manufacturing range includes custom heater elements for applications requiring purpose-built heating components. DS Fibertech Corporation manufactures both high-temperature and low-temperature furnace chambers as part of its furnace product range. Semiconductor diffusion heaters are a core product line, directly supporting diffusion-furnace applications in semiconductor processing. The company also manufactures ceramic vacuum-formed heaters and insulation shapes. Additional products include SOFC test heaters and laboratory furnaces for testing and laboratory heating requirements. The same range of custom heater elements, high- and low-temperature furnace chambers, semiconductor diffusion heaters, ceramic vacuum-formed heaters and insulation shapes, SOFC test heaters, and laboratory furnaces is repeated in the company’s diffusion-furnace-heater product information. For wafer-fabrication furnace systems, the chamber lineup spans standard-gauge, Low Mass/Fast Ramp, and specialty temperature ranges, complemented by replacement heaters and selected vertical-element refurbishment. This combination covers furnace chambers, heating elements, insulation shapes, diffusion heaters, replacement heaters, furnace accessories, refurbishment, SOFC testing, and laboratory furnace applications within the company’s stated manufacturing scope. Custom high-temperature furnace chambers and semiconductor diffusion heaters are identified together as certified manufacturing activities, while customer service and lead-time support accompany the product offering.
Capabilities and products
- diffusion furnace chamber design and manufacturing for wafer fabrication
- standard furnace chambers from 400 degC to 1350 degC
- Low Mass/Fast Ramp chambers from 200 degC to 1250 degC
- specialty furnace chambers up to 1750 degC
- replacement heaters for Kokusai/ASM/Aviza/SVG Thermco
- Torch elements
- Vestibule Blocks
- Soft Collars
- vertical heating-element refurbishment
- custom heater elements
- ceramic vacuum-formed heaters
- ceramic vacuum-formed insulation shapes
- SOFC test heaters
- laboratory furnaces