At a glance
| Booth | P5600 |
| Country | JP |
| Website | www.daihen.co.jp |
Company profile
DAIHEN Corporation is a Japanese manufacturer whose business spans power infrastructure, welding and mechatronics, robots, high-frequency power supplies and clean robots. It is a specialized manufacturer supporting power infrastructure and manufacturing, with core businesses in welding and cutting machines, welding machines, robots, high-frequency power supplies and clean robots. Its clean robot products are wafer transfer robots for semiconductor manufacturing environments, including vacuum robots and atmospheric transfer robots for wafers up to 300 mm. The clean robot products include high-precision, low-vibration double-arm vacuum robots for high-temperature processes, selectable single-arm vacuum robots and SCARA-style atmospheric transfer robots. The most relevant DAIHEN activities for semiconductors are wafer-handling clean robots and related semiconductor equipment, while the company's broader portfolio also includes welding systems, power electronics and industrial robotics.
Capabilities and products
- SCARA-style atmospheric transfer robots
- atmospheric transfer robots for wafers up to 300 mm
- double-arm vacuum robots for high-temperature processes
- high-frequency power supplies
- single-arm vacuum robots
- vacuum robots for wafers up to 300 mm
- wafer transfer clean robots for semiconductor manufacturing