At a glance
| Booth | R7127 |
| Country | TW |
| Website | zh-tw.dahyoung.com |
Company profile
Dah Young Vacuum Equipment Co., Ltd. was established in 1968 and specializes in PVD and PECVD technologies for the semiconductor and precision optics industries, placing coating-system technology at the center of its work in these two manufacturing fields. The company states an objective of building intelligent and efficient coating systems for semiconductor and precision-optics applications, and its technical focus therefore combines vacuum-coating know-how with equipment development for production use. An in-house R&D team and a research center support Dah Young Vacuum Equipment Co., Ltd. in developing its own technologies while also participating in global collaboration, giving the company both an internal development base and an external cooperation route for technology advancement. In 2024, Dah Young Vacuum Equipment Co., Ltd. was officially certified as a supplier to Taiwan Semiconductor Manufacturing Company Limited (TSMC), adding a named semiconductor-customer qualification to its company record. Dah Young Vacuum Equipment Co., Ltd. also reports that its systems operate stably on production lines around the world and that it supplies technical solutions to customers worldwide, extending its coating-equipment activities beyond a single domestic production environment.
Exhibits
The SPC, or Semiconductor Plasma-resistant Coater, is a coating system optimized to provide stable and reliable rare-earth oxide thick-film production for semiconductor equipment makers, component manufacturers, and in-fab maintenance service providers. For SPC applications, the stated industry-standard film-thickness range is typically 10 to 50 µm, while some extreme applications require films of 100 µm or more, giving the system a defined role in plasma-resistant thick-film coating work. The MPS, or Mobile Panel Sputter, is built on Dah Young Vacuum Equipment Co., Ltd.'s proprietary ARMS high-precision sputtering platform and is optimized specifically for large-area mobile and touch-panel mass production. Its MPS configuration combines dual sputter systems with dual ICP plasma sources, rotational planar fixtures, and large-area uniformity optimization in a high-throughput arrangement intended for mobile-panel sputtering production. The MPS is positioned for consumer-electronics brands and panel manufacturers that require large-area mobile or touch-panel production, linking the ARMS platform, plasma sources, fixture rotation, and uniformity control to a defined panel-manufacturing application. The ALD, or Atomic Layer Deposition System, incorporates technology transferred from Taiwan's National Center for Instrumentation Research (NCIR), under the National Institutes of Applied Research (NIAR), and is based on years of ALD research achievements at a Taiwanese national research institute. Dah Young Vacuum Equipment Co., Ltd. combines that transferred ALD technology with its own years of optical-coating mass-production integration experience to build the ALD equipment platform. The ALD platform uses a Plasma-Enhanced architecture, supports diverse precursors and SEMI-standard handling, and has a target specification covering wafer sizes from 4 inches and above, defining its semiconductor-process handling range and its plasma-enhanced deposition approach.
Capabilities and products
- PVD and PECVD coating technologies
- plasma-resistant rare-earth oxide thick-film coating systems for semiconductors
- 10–50 µm rare-earth oxide thick-film processing
- large-area mobile/touch-panel sputtering systems
- Plasma-Enhanced ALD systems