At a glance
| Booth | M1139 |
| Country | TW |
| Product categories | PV: Cells · Cleaning; Washing Equipment for Assembly & Packaging · Acoustic Spectroscopy; Electron Spectroscopy for Chemical Analysis (ESCA); Ultrasonic; Acoustical Mi · Fiber Optic Inspection Instruments · Spectrometers; Fourier Transform Infrared (FTIR); Attenuated Total Reflectance FTIR (ATR-FTIR); Auge · Thermal Sensing, Measurement, Analysis · Inspection and Metrology · Cleaning; Washing; Drying Equipment for Substrate, Fab Processing · Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD · Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment · Etching; Stripping; Ashing - Dry and Wet Equipment · Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment · Optical Test Systems · Sensors · Process Monitoring systems · Temperature Sensing; Control; Recirculators; Chillers; Heat Exchangers · Measurement and Control Technology · Chemical; Pure Water; Fluid Handling; Storage; Supply Systems · Chemical; Pure Water; Fluid Monitoring & Control Systems · Process Controls · Waste Control; Effluent Management Systems (Fluid & Gas; Exhaust Conditioning; Scrubbers) |
| Website | www.ci-semi.com |
Company profile
CI Semi, a division of CI Systems Ltd, develops, manufactures and markets process monitoring and control systems for the semiconductor, solar PV, LED and FPD markets. Active in the semiconductor process equipment market since 1992, CI offers non contact wafer temperature monitors and wet process concentration monitors to OEMs and to end users. CI's family of noncontact temperature monitors ( the NTM line ) incorporates real-time, same point emissivity measurement and compensation, making them the ideal solution for in situ process monitoring. CI’s family of wet process analyzers ( WetSpec line ) offers cost effective solutions for in-line wet chemistry monitoring. These range from conductivity and NDIR solutions for concentration measurement of simple chemistries, to spectroscopic systems for measuring multiple constituents and residues in complex solutions.
Capabilities and products
- WetSpec in-line wet chemistry monitoring analyzers
- conductivity and NDIR concentration measurement for wet chemistries
- non-contact wafer temperature monitors (NTM line)
- real-time same-point emissivity measurement and compensation
- spectroscopic measurement of constituents and residues in complex wet solutions