基本資料
| 攤位 | M1139 |
| 國別 | TW |
| 產品分類 | PV: Cells · Cleaning; Washing Equipment for Assembly & Packaging · Acoustic Spectroscopy; Electron Spectroscopy for Chemical Analysis (ESCA); Ultrasonic; Acoustical Mi · Fiber Optic Inspection Instruments · Spectrometers; Fourier Transform Infrared (FTIR); Attenuated Total Reflectance FTIR (ATR-FTIR); Auge · Thermal Sensing, Measurement, Analysis · Inspection and Metrology · Cleaning; Washing; Drying Equipment for Substrate, Fab Processing · Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD · Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment · Etching; Stripping; Ashing - Dry and Wet Equipment · Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment · Optical Test Systems · Sensors · Process Monitoring systems · Temperature Sensing; Control; Recirculators; Chillers; Heat Exchangers · Measurement and Control Technology · Chemical; Pure Water; Fluid Handling; Storage; Supply Systems · Chemical; Pure Water; Fluid Monitoring & Control Systems · Process Controls · Waste Control; Effluent Management Systems (Fluid & Gas; Exhaust Conditioning; Scrubbers) |
| 網站 | www.ci-semi.com |
公司簡介
CI Semi 是 CI Systems Ltd 旗下的事業部，開發、製造並銷售用於半導體、太陽能光電、LED 與 FPD 市場的製程監控與控制系統。CI 自 1992 年起即活躍於半導體製程設備市場，向 OEM 與終端使用者提供非接觸式晶圓溫度監測器與濕製程濃度監測器。CI 的非接觸式溫度監測器系列（NTM 系列）整合即時、同點的放射率量測與補償，是原位（in-situ）製程監控的理想方案。CI 的濕製程分析儀系列（WetSpec 系列）為線上濕式化學監測提供具成本效益的解決方案，範圍涵蓋用於簡單化學品濃度量測的電導率與 NDIR 方案，到用於量測複雜溶液中多種成分與殘留物的光譜系統。
能力與產品項目
- WetSpec 線上濕式化學監測分析儀
- 即時同點放射率量測與補償
- 濕式化學品的導電度與 NDIR 濃度量測
- 複雜濕式溶液中成分與殘留物的光譜量測
- 非接觸式晶圓溫度監測器（NTM line）